Waferpedia

Comparison ledger

.204 PSL WaferversusQuadra 3

KLA .204 PSL Wafer, Nordson Quadra 3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
Quadra 3Nordson
OEMKLANordson
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferNordson Quadra 3
Cited variants—
  • Quadra 3 Pro[1]
Specifications
ConfigurationNIST Traceable[2]3 Wire PNE[5]
Wafer Size8 inch[3]—
TraceabilityNIST[4]—
Compatible ToolsSurfscan 6xy0, Sp1[2]—
NIST TraceableYes[3]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[3]—
Phase—1 Phase[5]
Model—Quadra 3[6]
OEM—Nordson / Dage[6]
Category—Metrology & Inspection[5]
Power—200 - 230v[5]
Frequency—50/60 hz[5]
X-ray tube—QuadraNT Sealed Transmission Tube (0.95 µm feature resolution, 30–160 kV, 10 W max)[7]
Detector—Aspire FP Flat Panel (1.4 MP, 75 µm pixel pitch, 10 fps, 16-bit digitization)[7]
Geometric magnification—Up to 2000×[7]
Total magnification—Up to 7500×[7]
Sample stage—Dual-axis tilt geometry (±70° tilt per axis, no sample rotation required)[7]
Inspection area—510 × 445 mm[7]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (7)Every fact above is drawn from these public sources
  1. [1]quiptech.comquiptech.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com
  6. [6]inventory listing
  7. [7]instrumenthive.cominstrumenthive.com