Comparison ledger
KLA .204 PSL Wafer, Olympus MX51, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MX51Olympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Olympus MX51 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Type | — | Fluorescence Microscope[4] |
| Optical system | — | UIS2 (UIS) universal infinity system[5] |
| Viewing head | — | Trinocular erect image head (U-ETR-4)[6] |
| Eyepieces | — | 10x/26.5 mm super widefield[6] |
| Reflected light illuminator | — | Brightfield/Darkfield illuminator with 100W halogen lamphouse (U-LH100L-3)[6] |
| Nosepiece | — | 5-position brightfield/darkfield nosepiece (U-D6BDRE)[6] |
| Objectives (standard set) | — | MPlanFL N BD 5x, LMPlanFL N BD 10x, 20x, 50x[6] |
| Stage (manual) | — | MX-SIC6R2 6x6-inch stage or U-SIC4R2/SIC4L2 4x4-inch stage[5] |
| Motorized XY stage | — | ProScan H105/2OL series with 154x154 mm travel, encoded or non-encoded options[7] |
| Wafer size capability | — | Up to 6 inch (150 mm) with optional wafer chucks (HWC15S for 4" & 6", HWC15V for 150 mm)[7] |
| Microscope frame weight | — | About 11 kg (24.3 lbs); total system weight about 26 kg (57.3 lbs)[5] |
| Halogen lamp life | — | 2000 hours for long-life type 6V30WHAL-L[5] |
| Autofocus (optional) | — | PF850 standalone hardware autofocus[7] |
| Standards compliance | — | CE, FCC Part 15 Class A, SEMI S2-0703, SEMI S8-1103[5] |
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