Comparison ledger
KLA .204 PSL Wafer, Sonoscan Gen7, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gen7Sonoscan | |
|---|---|---|
| OEM | KLA | Sonoscan |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Sonoscan Gen7 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Product type | — | acoustic microscope[4] |
| Inspection method | — | pulse-echo ultrasonic imaging[6] |
| Acoustic frequency range | — | 5–400 MHz[6] |
| Scan field | — | up to 350 mm × 350 mm[6] |
| Scan capacity | — | small part to a large 350 mm wafer chuck[5] |
| Monitors | — | dual 28-inch 4K monitors[5] |
| Motors | — | five independent high-speed servo motors[6] |
| Positioning repeatability | — | ±0.5 µm XYZ positioning repeatability[6] |
| Software | — | Sonolytics 2[6] |
| Instrument type | — | C-SAM ultrasonic scanning acoustic microscope[6] |
| Acoustic imaging generation | — | seventh-generation evolution[6] |
| Alternative acoustic frequency range stated | — | 5 MHz to 200 MHz[7] |
| Wafer chuck capacity | — | up to a 350 mm wafer chuck[5] |
| Wafer size capability stated | — | 300 mm wafer[5] |
| Pulser/receiver | — | 500 MHz pulser/receiver[6] |
| Display | — | dual 28-inch 4K monitors[6] |
| Software platform | — | Windows 10[6] |
| Feature | — | PolyGate[5] |
| Sample-stage access | — | open access and illuminated tower referenced sample stage[5] |
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