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Sonoscan

Gen7

Metrology & InspectionSonoscan Gen7 family
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SonoscanGen7
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Power

5–400 MHz[3]

Performance

±0.5 µm XYZ positioning repeatability[3]

What it is

General reference — not yet source-verified

An acoustic microscope uses ultrasound to inspect internal features in packaged parts and layered materials without cutting the specimen. Acoustic microscopes in this class are used for nondestructive analysis of defects in industrial products and semiconductor devices.

How it works

The Gen7 uses pulse-echo ultrasonic imaging. The system sends high-frequency acoustic energy into a sample that is immersed in deionized water coupling medium and measures reflected signals from internal interfaces and discontinuities.[3]

The Gen7 uses acoustic contrast that arises from differences at interfaces inside the part. The system is used to reveal delaminations, voids, cracks, disbonds, and entrapped moisture.[3]

The Gen7 includes Sonolytics 2 software, dual twenty-eight inch monitors, five independent high-speed servo motors, and advanced imaging modes such as PolyGate, Virtual Rescanning Mode, and Frequency Domain Imaging. The Gen7 also includes digital image analysis functions and automated scanning features.[1][3][2]

Where it fits in the process flow

General reference — not yet source-verified

The Gen7 sits in non-destructive test and inspection rather than in wafer fabrication or destructive failure analysis. The tool supports inspection of finished or partially assembled parts where internal integrity must be checked before release to later assembly or reliability steps.

Applications

The Gen7 is used to inspect defects such as delaminations, voids, cracks, disbonds, porosity, and moisture-related issues inside layered parts.[3][4]

  • test and inspection
  • nondestructive analysis of defects in industrial products and semiconductor devices

What do the numbers mean?

Power & electrical5

Acoustic frequency range
5–400 MHz[3]
Accurate?
Acoustic frequency range
5–200 MHz[4]
Accurate?
Acoustic frequency range
5 MHz to 400 MHz[3]
Accurate?
Alternative acoustic frequency range stated
5 MHz to 200 MHz[4]
Accurate?
Pulser/receiver
500 MHz pulser/receiver[3]
Accurate?

Wafer handling4

Scan capacity
small part to a large 350 mm wafer chuck[2]
Accurate?
Scan capacity
single part to a 300 mm wafer[2]
Accurate?
Wafer chuck capacity
up to a 350 mm wafer chuck[2]
Accurate?
Wafer size capability stated
300 mm wafer[2]
Accurate?

Optics & imaging1

Sample-stage access
open access and illuminated tower referenced sample stage[2]
Accurate?

Performance1

Positioning repeatability
±0.5 µm XYZ positioning repeatability[3]
Accurate?

Control & software3

Software
Sonolytics 2[3]
Accurate?
Software
Sonolytics 2 for Windows 10[2]
Accurate?
Software platform
Windows 10[3]
Accurate?

Configuration & options13

Product type
acoustic microscope[1]2 sources
Accurate?
Product type
C-SAM scanning acoustic microscope[2]
Accurate?
Inspection method
pulse-echo ultrasonic imaging[3]
Accurate?
Scan field
up to 350 mm × 350 mm[3]
Accurate?
Monitors
dual 28-inch 4K monitors[2]2 sources
Accurate?
Motors
five independent high-speed servo motors[3]
Accurate?
Motors
5 independent motors[2]
Accurate?
Instrument type
C-SAM ultrasonic scanning acoustic microscope[3]
Accurate?
Acoustic imaging generation
seventh-generation evolution[3]
Accurate?
Display
dual 28-inch 4K monitors[3]
Accurate?
PolyGate[2]
Accurate?
Virtual Rescanning Mode (VRM)[2]
Accurate?
Frequency Domain Imaging (FDI)[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Acoustic frequency range5–400 MHz[3]
  • Acoustic frequency range5–200 MHz[4]
  • Acoustic frequency range5 MHz to 400 MHz[3]
  • Alternative acoustic frequency range stated5 MHz to 200 MHz[4]
  • Pulser/receiver500 MHz pulser/receiver[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What inspection task does the Gen7 perform?

The Gen7 performs nondestructive internal inspection with acoustic microscopy.[1][2]

What imaging method does the Gen7 use?

The Gen7 uses pulse-echo ultrasonic time-of-flight imaging.[3][4]

Not publicly documented

The following facts about the Gen7 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gen7 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Gen7 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Gen7 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Gen7 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Gen7 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]befirst-tech.com — befirst-tech.combefirst-tech.com
  3. [3]instrumenthive.com — instrumenthive.cominstrumenthive.com
  4. [4]instrumenthive.com — instrumenthive.cominstrumenthive.com
  5. [5]Gen7 — Sonoscan | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  6. [6]Nordson Sonoscan GEN7™ C‑SAM® Acoustic Microscope | Cesaroni Design — cesaroni.comcesaroni.com
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Last updated Oct 13, 2026.

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