Sonoscan
Provisional entry — research in progress
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An acoustic microscope uses ultrasound to inspect internal features in packaged parts and layered materials without cutting the specimen. Acoustic microscopes in this class are used for nondestructive analysis of defects in industrial products and semiconductor devices.
The Gen7 uses pulse-echo ultrasonic imaging. The system sends high-frequency acoustic energy into a sample that is immersed in deionized water coupling medium and measures reflected signals from internal interfaces and discontinuities.[3]
The Gen7 uses acoustic contrast that arises from differences at interfaces inside the part. The system is used to reveal delaminations, voids, cracks, disbonds, and entrapped moisture.[3]
The Gen7 includes Sonolytics 2 software, dual twenty-eight inch monitors, five independent high-speed servo motors, and advanced imaging modes such as PolyGate, Virtual Rescanning Mode, and Frequency Domain Imaging. The Gen7 also includes digital image analysis functions and automated scanning features.[1][3][2]
The Gen7 sits in non-destructive test and inspection rather than in wafer fabrication or destructive failure analysis. The tool supports inspection of finished or partially assembled parts where internal integrity must be checked before release to later assembly or reliability steps.
The Gen7 is used to inspect defects such as delaminations, voids, cracks, disbonds, porosity, and moisture-related issues inside layered parts.[3][4]
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The following facts about the Gen7 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gen7 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gen7 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gen7 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gen7 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gen7 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 13, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.