Comparison ledger
KLA .204 PSL Wafer, Woollam M-2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | M-2000Woollam | |
|---|---|---|
| OEM | KLA | Woollam |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Woollam M-2000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Equipment type | — | Spectroscopic ellipsometer[4] |
| Location | — | SEEL 168 Bay 1[4] |
| Designed for | — | Precise characterization of thin films[4] |
| Measures | — | Thickness, refractive index, and extinction coefficient[4] |
| Spectral range | — | UV to near-infrared[4] |
| Measurement technology | — | Rotating compensator technology[4] |
| Measurement type | — | Thickness, refractive index, extinction coefficient[4] |
| Technology | — | Rotating compensator[4] |
| Data acquisition | — | High-speed, high-accuracy[4] |
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