Waferpedia

Woollam

M-2000

Metrology & InspectionWoollam M-2000 family
Research Quality: 40% complete
M-2000 — colorado.edu
Fig. 01M-2000colorado.edu[1]
  • Plate 01J.A. Woolam M-2000 training video

    Eyring Materials CenterWatch on YouTube
  • Plate 02ASU Core Facilities Equipment Showcase: J.A. Woollam M2000 Spectroscopic Ellipsometer

    Arizona State University ResearchWatch on YouTube

What is it?

The J.A. Woollam M-2000 is listed in COSINC's metrology equipment as a spectroscopic ellipsometer located in SEEL 168 Bay 1. The source states that it is designed for precise characterization of thin films and measures thickness, refractive index, and extinction coefficient across a broad spectral range from UV to near-infrared using rotating compensator technology.

What can it run?

Process applications and technology nodes documented for this tool.

  • Thin-film characterization
  • Complex multilayer stacks
  • Transparent films
  • Advanced material research

What do the numbers mean?

Configuration & options6

Equipment type
Spectroscopic ellipsometer[1]
Accurate?
Location
SEEL 168 Bay 1[1]
Accurate?
Designed for
Precise characterization of thin films[1]
Accurate?
Measures
Thickness, refractive index, and extinction coefficient[1]
Accurate?
Spectral range
UV to near-infrared[1]
Accurate?
Measurement technology
Rotating compensator technology[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the M-2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M-2000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M-2000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M-2000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M-2000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M-2000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]colorado.educolorado.educolorado.edu
  2. [2]Resource Scheduler & Rates | Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) | University of Colorado Bouldercolorado.educolorado.edu
  3. [3]Resource Scheduler & Rates | Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) | University of Colorado Bouldercolorado.educolorado.edu
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Last updated Jul 29, 2026.

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