Comparison ledger
KLA 2351, KLA Puma 9120 Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2351KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer System | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2351 | KLA Puma 9120 |
| Specifications | ||
| Configuration | With HDD & Software[1] | User Interface Software Version 9.3.309.2.8[3] |
| Load Port Qty | 2[1] | — |
| Wavelength Illumination | 370~720 nm[1] | 370~720 nm[4] |
| Wavelength Band | Visible, UV[1] | Visible, UV[4] |
| Pixel Size | 0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[1] | — |
| Array Defect Capture Rate | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[1] | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[4] |
| Array False Defect Rate | ≤1.5%(all sizes)[1] | ≤1.5% (all sizes)[4] |
| Random Defect Capture Rate | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[1] | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[4] |
| Random False Defect Rate | ≤1.5% (all sizes)[1] | ≤1.5% (all sizes)[4] |
| Repeatability | ≥90% (20 consecutive run on the same DSW wafer)[1] | ≥90% (20 consecutive run on the same DSW wafer)[4] |
| Wafer size | Wafer Transfer System[1] | — |
| Wafer Sizes | 8 inch; 12 inch[2] | 200 mm (8 in), 300 mm (12 in)[5] |
| Pixel Sizes | 0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[1] | 0.16μm, 0.20μm, 0.25μm, 0.39μm, 0.62μm[4] |
| Vintage | 2002[1] | — |
| Illumination Wavelength | 370~720 nm[1] | — |
| Load Port Quantity | 2[1] | 2[4] |
| User Interface | Monitor, Workstation, Keyboard, Trackball, Joystick[1] | — |
| Main Body Components | Inspection Station, Wafer Transfer System, Stage[1] | — |
| Includes | HDD & Software, External Blower, Power Line Conditioner[1] | — |
| Make | KLA[1] | — |
| Model | 2351[1] | Puma 9120[3] |
| Main Body | Inspection Station; Wafer Transfer System; Stage[1] | — |
| OEM | KLA[1] | KLA[3] |
| Category | Inspection System[1] | Metrology & Inspection[4] |
| User Interface Software Version | — | 9.3.309.2.8[4] |
| Operating System | — | Windows 2000[4] |
| Number of Inspection Pixel Models | — | 3[5] |
| Pixel Sizes (sLXX) Installed or Available | — | sL5, sL8, sL20[5] |
| Cameras | — | 2[5] |
| Loader Type | — | Dual open cassette loader[5] |
| Software Options: Array Mode Algorithm | — | Yes[5] |
| Software Options: Sizing | — | Yes[5] |
| Software Options: 9.1 Simulator | — | Yes[5] |
| Software Options: RICO Capable | — | No[5] |
| Number of Cameras | — | 2[5] |
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