Comparison ledger
KLA Flexus F 2320 I Stress Measurement, MPI PM100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PM100MPI | |
|---|---|---|
| OEM | KLA | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | 6" | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1991 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Flexus F 2320 I Stress Measurement | MPI PM100 |
| Specifications | ||
| Configuration | Dual Wavelength[1] | — |
| Software Version | 2.0[1] | — |
| Operating System | MS-DOS V6.22[1] | — |
| Voltage | 115V[1] | — |
| Current | 10A[1] | — |
| Wafer size | This system comes with an alignment/centering ring for a 6" wafer[1] | — |
| Wafer Sizes | 6 inch, 8 inch[1] | — |
| Vintage | 1991[1] | — |
| Measurement | Dual Wavelength[1] | — |
| Manufacturer | KLA[1] | — |
| Model | Flexus F 2320 I[1] | — |
| Wafer sizes | 6 in, 8 in[1] | — |
| Optics | Dual Wavelength[1] | — |
| Alignment/centering ring | Includes an alignment/centering ring for a 6" wafer[1] | — |
| 8-inch wafer alignment tool | Does not have any alignment tool for an 8" wafer[1] | — |
| Equipment | — | MPI TS150 Probe Station[2] |
| Use | — | Electrical testing on wafers or chips[2] |
| Terminal capacity | — | Maximum of 4 independent terminals + additional chuck grounding[2] |
| Wafer compatibility | — | Up to 6 inch wafers[2] |
| Probe positioners | — | MPI PM100 true X,Y,Z micro-positioners[2] |
| Probe tips | — | Interchangeable tungsten (W) contact tips[2] |
| Chuck stage | — | Fine-glide chuck stage on highly stable granite base[2] |
| Travel range | — | 150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range[2] |
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