Comparison ledger
KLA Puma 9120 Defect, KLA Stereoscan 440, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Puma 9120 | KLA Stereoscan 440 |
| Specifications | ||
| Configuration | User Interface Software Version 9.3.309.2.8[1] | Burned out filament[4] |
| User Interface Software Version | 9.3.309.2.8[2] | — |
| Operating System | Windows 2000[2] | — |
| Load Port Quantity | 2[2] | — |
| Wavelength Illumination | 370~720 nm[2] | — |
| Wavelength Band | Visible, UV[2] | — |
| Pixel Sizes | 0.16μm, 0.20μm, 0.25μm, 0.39μm, 0.62μm[2] | — |
| Array Defect Capture Rate | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2] | — |
| Array False Defect Rate | ≤1.5% (all sizes)[2] | — |
| Random Defect Capture Rate | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2] | — |
| Random False Defect Rate | ≤1.5% (all sizes)[2] | — |
| Repeatability | ≥90% (20 consecutive run on the same DSW wafer)[2] | — |
| Number of Inspection Pixel Models | 3[3] | — |
| Pixel Sizes (sLXX) Installed or Available | sL5, sL8, sL20[3] | — |
| Cameras | 2[3] | — |
| Loader Type | Dual open cassette loader[3] | — |
| Software Options: Array Mode Algorithm | Yes[3] | — |
| Software Options: Sizing | Yes[3] | — |
| Software Options: 9.1 Simulator | Yes[3] | — |
| Software Options: RICO Capable | No[3] | — |
| Wafer Sizes | 200 mm (8 in), 300 mm (12 in)[3] | — |
| OEM | KLA[1] | — |
| Model | Puma 9120[1] | Stereoscan 440[4] |
| Category | Metrology & Inspection[2] | Metrology & Inspection[5] |
| Number of Cameras | 2[3] | — |
| Manufacturer | — | KLA[5] |
| Tool type | — | Scanning electron microscope (SEM)[5] |
| Known failure mode | — | Burned out filament[5] |
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