Comparison ledger
KLA Puma 9130, KLA Puma 9130 Darkfield Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Puma 9130KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Puma 9130 | KLA Puma 9130 |
| Cited variants |
| — |
| Specifications | ||
| Voltage | 208 V[2] | — |
| Phase | 3 Phase[2] | — |
| Full Load | 16 A[2] | — |
| Largest Load | 8 A[2] | — |
| Configuration | 50/60 Hz[2] | Refurbished[5] |
| Amps Full Load | 4[3] | — |
| OEM | KLA[4] | — |
| Model | Puma 9130[4] | — |
| Category | Metrology & Inspection[4] | — |
| Electrical | 208 V, 3 phase, 50/60 Hz[4] | — |
| Full load current | 16 A[2] | — |
| Largest load current | 8 A[2] | — |
| Vintage | 2007[2] | — |
| Power | 208 V, 3 phase, 50/60 Hz[4] | — |
| Manufacturer | KLA[4] | — |
| Tool type | Metrology and inspection tool[4] | Darkfield defect inspection system[5] |
| Inspection type | Darkfield defect inspection system[4] | — |
| Primary application | Patterned wafer inspection[4] | — |
| Amps full load | 4 A[4] | — |
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