Waferpedia

Tool family

KLA Puma 9130

KLA2 entries
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Models in this family

  1. Puma 9130
  2. Puma 9130 Darkfield Defect

    KLA Puma 9130 Darkfield Defect Inspection System is a darkfield defect inspection system from KLA.

All entries

  1. Puma 9130KLA
    CategoryMetrology & Inspection
    7 specs
  2. Puma 9130 Darkfield DefectKLA

    KLA Puma 9130 Darkfield Defect Inspection System is a darkfield defect inspection system from KLA.

    CategoryMetrology & Inspection
    1 spec