KLA
Puma 9130
The KLA Puma 9130 is a metrology and inspection tool. The KLA Puma 9130 is used for patterned wafer inspection. The KLA Puma 9130 family includes a darkfield defect inspection system.[1][2]
What it is
The KLA Puma 9130 is a metrology and inspection tool from KLA. The Puma 9130 family includes a darkfield defect inspection system. The Puma 9130 is used for patterned wafer inspection. The Puma 9130 belongs to the Metrology & Inspection category.[1][2]
How it works
General reference — not yet source-verifiedDarkfield wafer inspection tools illuminate the wafer so that scattered light from particles, scratches, pattern damage, and other surface anomalies can be separated from a relatively dark background. Patterned-wafer inspection tools scan wafer surfaces and convert optical response into maps and review data that help engineers judge defectivity and process condition.
Where it fits in the process flow
General reference — not yet source-verifiedMetrology and inspection tools sit around patterning and other wafer-forming operations in semiconductor manufacturing. Patterned-wafer inspection is typically performed after process steps where new surface features or defect risks must be checked before lots continue to later fabrication stages.
Applications
The Puma 9130 is used for patterned wafer inspection. The Puma 9130 family includes darkfield defect inspection applications.[1]
What do the numbers mean?
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Puma 9130 Darkfield Defect | — | — | Described as a darkfield defect inspection system. | waferpedia.com[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the primary application of the Puma 9130?
The Puma 9130 is used for patterned wafer inspection.[1]
Not publicly documented
The following facts about the Puma 9130 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Puma 9130 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Puma 9130 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Puma 9130 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Puma 9130 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Puma 9130 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]Inventory photo
Last updated Oct 19, 2026.
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