Comparison ledger
KLA SFS 6420, Nikon S-210, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SFS 6420KLA | S-210Nikon |
|---|---|---|
| OEM | KLA | Nikon |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA SFS 6420 | Nikon S-210 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[3] |
| Power | 220V 50Hz 1 Phase[1] | 200VAC 50/60Hz 3 Phase[3] |
| Manufacturer | KLA-Tencor[1] | Nikon[3] |
| Model | SFS 6420[1] | S-210[3] |
| Year | 1995[1] | — |
| Condition | Used[1] | Used[3] |
| Inspection type | Non-patterned wafer particle inspection[2] | — |
| Light source | Algon laser[2] | — |
| Voltage | 208V[2] | — |
| Phase | 1 phase[2] | — |
| Frequency | 50/60Hz[2] | — |
| Vacuum | ~-23 inHg[2] | — |
| External exhaust | 4" diagram, 2 holes for system and laser[2] | — |
| System software | 4.2[2] | — |
| Operating system | Windows 98[2] | — |
| Install type | stand-alone[2] | — |
| Year(s) | — | 2014[3] |
| Quantity | — | 1[3] |
| Location | — | EUROPE (Western and Northern)[3] |
| Status note | — | Still in the fab running wafers[3] |