Comparison ledger
KLA Surfscan AIT 8010 Particle Defect, KLA Surfscan SP 1 TBI, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Surfscan | KLA Surfscan |
| Cited variants | — |
|
| Specifications | ||
| Software version | 3.3.2.813[2] | — |
| CIM | SECS, GEM[2] | — |
| Volts | 200-240[2] | — |
| Amps | 30[2] | — |
| Phase | 1[2] | 208-240 V, Single phase[4] |
| Configuration | Hz 50-60[2] | 50/60 Hz[4] |
| OEM | KLA[2] | — |
| Model | Surfscan AIT 8010[2] | Surfscan SP 1 TBI[5] |
| Category | Metrology & Inspection[3] | — |
| Wafer size | 200mm[3] | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[4] |
| Hz | 50-60[2] | — |
| Full Load Amps | — | 24 A[4] |
| Machine Main Breaker Rating | — | 30 A[4] |
| Ampere Rating of Largest Load | — | 12 A[4] |
| Bright Field (DIC) Option, P/N | — | 515990[4] |
| XY Coordination, P/N | — | 0082158-000[4] |
| Bright Field Sizing, P/N | — | 0082158-000[4] |
| Haze Normalization, Haze Analysis, P/N | — | 0081928-000[4] |
| SEC-1, P/N | — | 0021643-000[4] |
| HSMS, P/N | — | 528080[4] |
| PC-NFS Cient, P/N | — | 556025[4] |
| Desktop PC Software Option, P/N | — | 528170[4] |
| Make | — | KLA[5] |
| Wafer sizes | — | 12 inch[5] |
| Inspection type | — | Unpatterned wafer inspection system[1] |
| Illumination | — | Normal and oblique illumination with brightfield capabilities[1] |
| Triple Beam Illumination | — | TBI[1] |
| Inspection capability | — | Designed to meet the challenging inspection requirements of sub-0.18 micron devices[1] |
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