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Comparison ledger

12 Lapperversus6 DA

Lapmaster 12 Lapper, Strasbaugh 6 DA, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
6 DAStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Strasbaugh 6 DA
Cited variants—
Specifications
Outside plate diameter12 inches[3]—
Lapping Speed Range0 to 60 rpm[4]—
Wafer Size Compatibility4 inches or smaller[3]—
Input Voltage110 V[3]—
Frequency60 Hz[3]60 Hz[6]
Phase1[3]1 phase[5]
Number of Rings3[3]—
Number of Weights3[3]—
Includes Slurry SystemYes[3]—
Includes TimerYes[3]—
Configuration—four spindle[5]
manufacturer—Strasbaugh[5]
model—6 DA[5]
equipment type—Grinder / Polisher[5]
spindles—four spindle[5]
size—18"[5]
voltage—220 volts[6]
category—CMP[6]
Type—Polisher[2]
Stations—2[2]
Power—220V single-phase, 18 amp[2]
Format—18 inch[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]jmind.comjmind.com
  4. [4]etd.ohiolink.eduetd.ohiolink.edu
  5. [5]inventory listing
  6. [6]waferpedia.comwaferpedia.com