Comparison ledger
Plasma-Therm SLR 770 Metal, Tegal 110, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SLR 770 MetalPlasma-Therm | 110Tegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm SLR 770 | Tegal 110 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Dual chamber[2] | — |
| OEM | Plasma-Therm[3] | — |
| Model | SLR 770 Metal[3] | — |
| Category | Etch[2] | — |
| Wafer size | 4 inch[3] | — |
| Sample introduction | Load Locked sample introduction[3] | — |
| Vacuum & pumping | Turbomolecular pumping[2] | — |
| Process chamber | Left chamber is dedicated to chlorine based metal etching[3] | — |
| Condition note | Some issue with the source[3] | — |
| model | — | 110 SE[1] |
| application focus | — | process development applications[1] |
| process capability | — | deep silicon plasma etching[1] |
| capabilities | — | very high aspect ratio trench etch and profile control[1] |
| configuration | — | multiple configurations with minimum technical intervention[1] |
| System type | — | plasma etch system[4] |
| Supported components | — | MEMS and 3D-IC components[1] |
| Control capability | — | very high aspect ratio trench etch and profile control[4] |
| Physical description | — | compact[1] |
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