Waferpedia

Plasma-Therm

SLR 770 Metal

EtchPlasma-Therm SLR 770 family
Research Quality: 30% complete
SLR 770 Metal — Inventory photo
Fig. 01SLR 770 MetalInventory photo[1]

What is it?

The Plasma-Therm SLR 770 Metal is a dual-chamber 4-inch metal etcher with load-locked sample introduction and turbomolecular pumping.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Some issue with the source

What do the numbers mean?

Vacuum & pumping1

Turbomolecular pumping[1]
Accurate?

Wafer handling1

Load Locked sample introduction[1]
Accurate?

Configuration & options3

Dual chamber[1]
Accurate?
Left chamber is dedicated to chlorine based metal etching[1]
Accurate?
Some issue with the source[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationTurbomolecular pumping[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SLR 770 Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SLR 770 Metal are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SLR 770 Metal are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SLR 770 Metal are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the SLR 770 Metal is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the SLR 770 Metal are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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