Plasma-Therm
SLR 770 Metal
The Plasma-Therm SLR 770 Metal is a dual-chamber metal etcher. The Plasma-Therm SLR 770 Metal is configured for 4-inch wafers. The Plasma-Therm SLR 770 Metal has load-locked sample introduction and turbomolecular pumping.[1][2]
What it is
How it works
Where it fits in the process flow
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Some issue with the source
What do the numbers mean?
Vacuum & pumping2
- Turbomolecular pumping[3]
Wafer handling3
- Load Locked sample introduction[3]
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the Plasma-Therm SLR 770 Metal handle?
The Plasma-Therm SLR 770 Metal is configured for 4-inch wafers.[3][1][2]
What chamber configuration does the Plasma-Therm SLR 770 Metal use?
The Plasma-Therm SLR 770 Metal uses a dual-chamber configuration.[3][1][2]
Not publicly documented
The following facts about the SLR 770 Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SLR 770 Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SLR 770 Metal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SLR 770 Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SLR 770 Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SLR 770 Metal are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Plasma-Therm SLR 770 family | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
Last updated Oct 13, 2026.
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