Comparison ledger
Semitool SAT Ozone Wafer, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SAT Ozone WaferSemitool | 1000PYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool SAT Ozone Wafer | YES 1000P |
| Specifications | ||
| Configuration | HydrOzone and FluorOzone[1] | Parallel plate[3] |
| Specs | 24000 W, 208V a.c., 3 Phase[1] | — |
| Ozone Generator A | MKS AX8403L Ozone Generator, Rev. 1B[1] | — |
| Ozone Destruct Upgrade (never installed) | INUSA Heated Catalytic Destruct Module, CAT03-H[1] | — |
| Process technology | HydrOzone and FluorOzone[1] | — |
| Bowl size | Single bowl, 24"[1] | — |
| DI Water Heater model | HCQ24-208-3-002-08[1] | — |
| DI Water Heater specs | 24000 W, 208V a.c., 3 Phase[1] | — |
| Ozone delivery system model | OZOMOD-STI-HO-0[1] | — |
| Ozone generator | MKS AX8403L Ozone Generator, Rev. 1B[1] | — |
| Model | — | 1000P[2] |
| System type | — | Plasma cleaning system[2] |
| Shelf configuration | — | Four 16 x 16 inch shelves[2] |
| Total capacity | — | 1024 square inches[2] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[2] |
| Number of shelves | — | 4[2] |
| Shelf size | — | 16 x 16 inches[2] |
| Power | — | 1000 W[3] |
| Operation modes | — | Active, RIE, Downstream[2] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[2] |
| Type | — | Plasma cleaning system[2] |
| Shelves | — | Four 16 x 16 inch shelves[2] |
| Control | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[2] |
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