Comparison ledger
Tegal 110, Ulvac NE 950 ICP-RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 110Tegal | NE 950 ICP-RIEUlvac |
|---|---|---|
| OEM | Tegal | Ulvac |
| Category | Etch | Etch |
| Wafer size | — | φ2’ φ4’ φ6’ φ8’ Single Wafer Auto Transfer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 110 | Ulvac NE 950 |
| Cited variants |
| — |
| Specifications | ||
| model | 110 SE[1] | — |
| application focus | process development applications[1] | — |
| process capability | deep silicon plasma etching[1] | — |
| capabilities | very high aspect ratio trench etch and profile control[1] | — |
| configuration | multiple configurations with minimum technical intervention[1] | — |
| System type | plasma etch system[2] | — |
| Supported components | MEMS and 3D-IC components[1] | — |
| Control capability | very high aspect ratio trench etch and profile control[2] | — |
| Physical description | compact[1] | — |
| Configuration | — | Gas Box:[3] |
| Gas 1 Horiba STEC SEC-E40 Ar | — | 100SCCM[3] |
| Gas 2 Horiba STEC SEC-E40 O2 | — | 100SCCM[3] |
| Gas 3 Horiba STEC SEC-E40 CHF3 | — | 100SCCM[3] |
| Cooling Gas | — | MKS 649A 50SCCM[3] |
| Match Box 1 | — | AMV-1000-12.5M-CT[3] |
| Match Box 2 | — | AMV-1000-AV3[3] |
| Valve | — | MKS T3PIA 26696[3] |
| Gauge | — | MKS E28D[3] |
| Process type | — | ICP-RIE (Inductively Coupled Plasma - Reactive Ion Etch)[3] |
| Wafer size | — | 2" to 12" wafers[3] |
| Chuck | — | φ 305mm (φ2’ φ4’ φ6’ φ8’)[3] |
| RF Generator 1 | — | AX-1000 (AD-TEC)[3] |
| RF Generator 2 | — | AX-1000 (AD-TEC)[3] |
| Gas 1 | — | Horiba STEC SEC-E40 Ar: 100SCCM[3] |
| Gas 2 | — | Horiba STEC SEC-E40 O2: 100SCCM[3] |
| Gas 3 | — | Horiba STEC SEC-E40 CHF3: 100SCCM[3] |
| Gas 4 | — | Horiba STEC SEC-E440J BCL3: 200SCCM[3] |
| Gas 5 | — | Horiba STEC SEC-E440J CL2: 200SCCM[3] |
| Gas 6 | — | Horiba STEC SEC-E440J SiCL4: 200SCCM[3] |
| Pressure valve | — | MKS T3PIA 26696[3] |
| Turbo pump | — | Shimadzu E1-D2203MT / TMP-2203LMTG[3] |
| Dry pump | — | Ulvac HR60[3] |
| Slit Valve | — | SMC XGT312-50336-1A[3] |
| Pirani Gauge | — | Pfeiffer Vacuum TPR280[3] |
| Vaucum Gauge | — | Ulvac M-24[3] |
| Temp Control | — | Risshi EXL 1106[3] |
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