Comparison ledger
Temescal BJD 1800, Temescal BJD 1800 Thermal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | BJD 1800Temescal | BJD 1800 ThermalTemescal |
|---|---|---|
| OEM | Temescal | Temescal |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | –2019 | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Temescal BJD 1800 | Temescal BJD 1800 |
| Specifications | ||
| Configuration | With Temescal CV 8 Power Supply[1] | External power suppy integrated into unit to improve the deposition to less than 1A/s (2025)[4] |
| Voltage | 208 V[1] | — |
| Current | 70 A[1] | — |
| Phase | 3 Phase[1] | — |
| Frequency | 60 Hz[1] | — |
| Model | BJD 1800[1] | — |
| Make | Airco / Temescal[1] | — |
| System type | Thermal evaporator[2] | Thermal evaporation evaporator[2] |
| Deposition type | E-beam evaporator[3] | — |
| Power supply | Temescal CV 8 Power Supply[1] | External power supply integrated into unit[4] |
| Electrical | 208 V, 70 A, 3 Phase, 60 Hz[1] | — |
| Carousel pockets | 4 pockets[2] | 4[4] |
| Deposition rate | Less than 1 Å/s with integrated external power supply[2] | Less than 1 Å/s (with integrated external power supply)[2] |
| Chamber type | — | Low-profile bell jar[5] |
| Chamber size | — | 18-inch (457 mm) or 20-inch (508 mm)[5] |
| Control sweep | — | Inficon (installed 2023)[4] |
| Evaporation sources | — | 2 thermal sources (configurable)[5] |
| Cryopump | — | Standard configuration[5] |
| Substrate fixturing | — | 3 planet deposition fixturing[6] |
| Co-deposition capability | — | Dual source co-deposition[6] |
| Deposition controller | — | Sigma Dual Deposition Controller[6] |
| Vintage of documented unit | — | 1991[4] |
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