Temescal

BJD 1800 Thermal

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The Airco / Temescal BJD 1800 Thermal Evaporator is a thermal evaporation system for thin film deposition. The BJD 1800 includes an integrated external power supply to improve deposition to less than 1 Å/s. The BJD 1800 is equipped with a 4-pocket carousel and uses an Inficon control sweep.^[1]^[2]^[3]

TemescalBJD 1800 Thermal

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Power

External power supply integrated into unit^[1]

Vacuum

Standard configuration^[4]

What it is

The Temescal BJD 1800 Thermal is a thermal evaporator in the deposition category. The BJD 1800 Thermal is a Temescal Airco / Temescal model designation.^[2]^[3]^[1]

Where it fits in the process flow

General reference — not yet source-verified

The Temescal BJD 1800 Thermal belongs in the thin-film deposition step of a fabrication flow. The machine applies material after substrate preparation and before later patterning or integration steps.

What do the numbers mean?

Power & electrical2

Deposition rate: Less than 1 Å/s (with integrated external power supply)^[2]
Power supply: External power supply integrated into unit^[1]

Vacuum & pumping2

Cryopump: Standard configuration^[4]
Cryopump: CTI Cryo Pump^[3]

Wafer handling1

Substrate fixturing: 3 planet deposition fixturing^[3]

Control & software5

Infinicon to control sweep (2023)^[1]; Control breaker pluse 30ft of 50A cable^[1]
Control sweep: Inficon (installed 2023)^[1]
Deposition controller: Sigma Dual Deposition Controller^[3]
Control sweep: Inficon to control sweep (2023)^[1]

Configuration & options10

External power suppy integrated into unit to improve the deposition to less than 1A/s (2025)^[1]; 4 pockets on carousel^[1]
System type: Thermal evaporation evaporator^[2]
Chamber type: Low-profile bell jar^[4]2 sources
Chamber size: 18-inch (457 mm) or 20-inch (508 mm)^[4]2 sources
Carousel pockets: 4^[1]
Evaporation sources: 2 thermal sources (configurable)^[4]2 sources
Co-deposition capability: Dual source co-deposition^[3]
Vintage of documented unit: 1991^[1]
Carousel pockets: 4 pockets on carousel^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Deposition rateLess than 1 Å/s (with integrated external power supply)^[2]
Power supplyExternal power supply integrated into unit^[1]
CryopumpStandard configuration^[4]
CryopumpCTI Cryo Pump^[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of deposition system is the Temescal BJD 1800 Thermal?

The Temescal BJD 1800 Thermal is a thermal evaporator for thin film deposition.^[2]

Not publicly documented

The following facts about the BJD 1800 Thermal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BJD 1800 Thermal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the BJD 1800 Thermal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the BJD 1800 Thermal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the BJD 1800 Thermal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the BJD 1800 Thermal is not on record.
Answerable by: an OEM datasheet or a fab qualification report