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Temescal

BJD 1800

DepositionProduced –2019Temescal BJD 1800 family
Research Quality: 60% complete
BJD 1800 — Inventory photo
Fig. 01BJD 1800Inventory photo[2]

Produced

–2019

Power

With Temescal CV 8 Power Supply[2]

What it is

The Temescal BJD 1800 is an electron-beam evaporator used for thin-film deposition in a cleanroom or semiconductor-processing environment. It is an Airco / Temescal system and is referred to as an ebeam deposition system.[2][4][5]

How it works

Thickness and deposition rate are controlled by an Inficon I/C5 deposition controller.[4][5]

Applications

The maximum substrate size given for the associated system is six inches.[4]

What do the numbers mean?

Power & electrical4

With Temescal CV 8 Power Supply[2]
Accurate?
Voltage
208 V[2]
Accurate?
Phase
3 Phase[2]
Accurate?
Frequency
60 Hz[2]
Accurate?

Configuration & options1

Current
70 A[2]
Accurate?

Vintage & configurations

  1. 2019-10-04Production end[1]

    A source states the systems have been out of production for some time.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationWith Temescal CV 8 Power Supply[2]
  • Voltage208 V[2]
  • Phase3 Phase[2]
  • Frequency60 Hz[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of deposition system is the Temescal BJD 1800?

It is an electron-beam evaporator for thin-film deposition.[4][5]

What controller is used for thickness and deposition rate control?

An Inficon I/C5 deposition controller is used.[4]

What maximum substrate size is given for the system?

The maximum substrate size is six inches.[4]

Not publicly documented

The following facts about the BJD 1800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the BJD 1800 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the BJD 1800 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the BJD 1800 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the BJD 1800 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the BJD 1800 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]mtl.mit.edumtl.mit.edumtl.mit.edu
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Temescal BJD 1800 Ebeam Evaporator (2) | NNCInnci.netnnci.net
  5. [5]TEMESCAL BJD-1800 OPERATION PROCEDURE Pdf Download | ManualsLibmanualslib.commanualslib.com
  6. [6]Temescal BJD 1800 E-Beam Evaporator For Sale | Used Semiconductor & Scientific Equipment for Salecapovani.comcapovani.com
  7. [7]Temescal System Sparestemescal.net (Aug 24, 2003)web.archive.org
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Last updated Jul 30, 2026.

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