Comparison ledger
YES 1000P, YES R3A-LMC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000PYES | R3A-LMCYES |
|---|---|---|
| OEM | YES | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1998 Acquisition | — |
| Control system | — | — |
| Generation | — | — |
| Family | YES 1000P | YES R3A-LMC |
| Specifications | ||
| Model | 1000P[1] | R3A-LMC[3] |
| System type | Plasma cleaning system[1] | — |
| Shelf configuration | Four 16 x 16 inch shelves[1] | — |
| Total capacity | 1024 square inches[1] | — |
| Control system | PLC driven with plain English real time process readout and diagnostics in the event of system abort[1] | — |
| Number of shelves | 4[1] | — |
| Shelf size | 16 x 16 inches[1] | — |
| Power | 1000 W[2] | — |
| Configuration | Parallel plate[2] | — |
| Operation modes | Active, RIE, Downstream[1] | — |
| Sample size range | From smallest semiconductor chip to large flat panels[1] | — |
| Type | Plasma cleaning system[1] | — |
| Shelves | Four 16 x 16 inch shelves[1] | — |
| Control | PLC driven with plain English real time process readout and diagnostics in the event of system abort[1] | — |
| Designed for | — | fast, uniform cleaning of lead frames and carrier borne devices loaded into one or two open-sided magazines[3] |
| Chamber design | — | parallel plate design[3] |
| Plasma uniformity | — | uniform plasma throughout the magazine[3] |
| Plasma modes | — | Active Plasma mode, RIE Plasma, Electron-free Plasma[3] |
| Plasma direction | — | left to right, right to left, or from both sides simultaneously[3] |
| Plasma gas inputs | — | two plasma gas inputs[3] |
| Back-fill gas input | — | provided for venting the chamber back to atmospheric pressure in an inert atmosphere, normally nitrogen[3] |
| Diagnostics display | — | plain English[3] |
| Readouts | — | plain English[3] |
| Function | — | Automatic plasma cleaning of lead frames and Auer boats[3] |
| Target products | — | Lead frames and carrier borne devices loaded into one or two open-sided magazines[3] |
| Design | — | Parallel plate design[3] |
| Gas inputs | — | Two plasma gas inputs[3] |
| Control/readout language | — | Plain English readouts and diagnostics[3] |
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