Comparison ledger
Zeiss 1540 EsB FIB-SEM, Zeiss 1550, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1540 EsB FIB-SEMZeiss | 1550Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss 15xx | Zeiss 15xx |
| Cited variants | — | |
| Specifications | ||
| Configuration | Dual Beam[3] | — |
| OEM | Zeiss[3] | — |
| Model | 1540 EsB[3] | — |
| Tool type | Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)[3] | — |
| Included analysis | EDX is included[3] | — |
| Detector | 10mm EDAX detector[4] | — |
| Known issue | Known issue with Ion Pump for FIB capability[3] | — |
| Vintage | 2014[5] | — |
| Voltage | — | 30 kV[6] |
| Equipment type | — | Scanning Electron Microscope (SEM)[6] |
| Operating voltage | — | 30 kV[6] |
| SEM source type | — | Schottky field-emission[2] |
| Resolution | — | 2-5 nm size range[2] |
| Accelerating voltage | — | 0.1 - 30 kV[1] |
| Detectors | — | Everhart-Thornley, InLens, energy-selected backscattered electrons (ESB)[1] |
| Spatial resolution | — | High-vacuum 1.0nm at 20kV; 2.5nm at 1kV[7] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →