Waferpedia

Tool family

ASML 4022.634.34071 PAAC 325/14 R PPCA

ASML1 entry

Models in this family

  1. The ASML 4022.634.34071 PAAC 325/14 R PPCA is a new, sealed Power Mod (SERV.634.34071) cleanroom product from 2018.