Waferpedia

Manufacturer

ASML

89 entries

  1. PAS 5500 850 DASML

    The ASML PAS 5500/850 D is a scanner for 6-inch wafers, using a Cymer ELS-6610 light source and supporting R type, 1.2 mm notch and flat wafers.

    CategoryLithography
  2. SERV.470.54502ASML
  3. PAS 5500ASML

    The ASML PAS 5500/275D is a high-throughput i-line stepper with 5X reduction, 365 nm exposure, and automated wafer handling for substrates up to 200 mm diameter.

    CategoryLithographyWafer200mmNode280 nm
    Legacy
  4. PAS 5000 55 AASML

    ASML PAS 5000 / 55 A is a stepper identified with an option set that includes Wafer Tilt Monitor.

    CategoryLithographyWaferWafer Tilt Monitor
  5. Twinscan AT 850 DASML

    The ASML Twinscan AT 850 D is a semiconductor manufacturing tool offered with a Cymer ELS 7600 or ELS 6610 laser and a Tel Lithius track.

  6. PAS 5500 700ASML

    The ASML PAS 5500 / 700 is a Scanner and a Stepper.

    CategoryLithography
  7. Twinscan 1200 BASML

    The ASML Twinscan 1200 B is a lithography scanner equipped with a Cymer XLA 160 laser, but it is non-operational due to an internal water leak near the lens and has no lens data available.

    CategoryLithography
  8. PAS 5500 400 i-LineASML

    The ASML PAS 5500/400 is an i-line stepper for 8-inch wafers with a resolution of 280nm, introduced around 2002.

    CategoryLithography
  9. PAS 2500ASML

    The PAS 2500 series was the first lithography system developed entirely by ASML and became the system that built the company.

    CategoryLithography
  10. PAS 5500 250 CASML
  11. Twinscan XT 1250 DASML
    CategoryLithographyWaferContinuous clampable wafer table for dry WSs: Absent
  12. 300 CASML

    The ASML 300 C is a model of equipment manufactured by ASML.

  13. XTF 400 FASML
  14. PAS 5500 300 CASML
    CategoryLithographyWaferWafer Alignment:
  15. 2500 40ASML

    The ASML 2500 / 40 is a stepper with a wafer table, reticle table, P-table, dipod, HP laser, and alignment laser.

    CategoryLithographyWaferWafer table
  16. 5500/80ASML

    The ASML 5500/80 is an i-line wafer stepper with 500nm resolution, <70nm alignment accuracy, and a 21mm x 21mm field size.

    CategoryLithographyWafer4-inch wafers; convertible to 3-inch or 6-inch platformsNode500nm resolution
  17. 4022.631.1584 Optical Gas AnalyzerASML

    ASML model 4022.631.1584 is an Optical Gas Analyzer.

    CategoryPrecision Optics
  18. Yield Star S 250 Overlay MeasurementASML
    CategoryMetrology & Inspection
  19. PAS 5500 250 C i-LineASML
    CategoryLithography
  20. PAS 5500 250 i-LineASML
    CategoryLithography
  21. PAS 5500 200 B i-LineASML
    CategoryLithography
  22. Twinscan NXT 2050 i ImmersionASML

    The Twinscan NXT 2050 i is a high-productivity deep ultraviolet immersion lithography system for advanced logic and memory nodes.

    CategoryLithography
  23. YieldStar S 1375 F Overlay MeasurementASML

    The ASML YieldStar S 1375 F is an overlay measurement system for 12-inch wafers.

    CategoryMetrology & Inspection
  24. YieldStar S 100 B Overlay MeasurementASML
    CategoryMetrology & Inspection
  25. Twinscan XT 400 F i-LineASML
    CategoryLithography
  26. PAS 5500 60 i-LineASML
    CategoryLithography
  27. PAS 5500 275 i-LineASML
    CategoryLithography
  28. PAS 5500 100 D i-LineASML
    CategoryLithography
  29. Twinscan XT 1950 HiASML

    ASML Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity.

    CategoryLithography
  30. Twinscan AT 750 BASML
  31. SERV.481.27891 ACC Controller AIASML
  32. PAS 5500 22ASML
    CategoryLithography
  33. Twinscan XT 1400 FASML

    The ASML Twinscan XT 1400 F Scanner is a 193nm (ArF) lithography scanner stated to handle 12-inch wafers.

    CategoryLithography
  34. URS 5000 55 BASML
    CategoryLithography
  35. 5000 55 BASML
    CategoryLithography
  36. PAS 5500 300 DUVASML

    The ASML PAS 5500/300 DUV is a deep ultraviolet (DUV) stepper.

    CategoryLithography
  37. Twinscan NXT 1980 Di ImmersionASML
    CategoryLithography
  38. PAS 5500 100 CASML

    The ASML PAS 5500 / 100 C is a stepper system from 1995.

    CategoryLithography
  39. AT 850 BASML
  40. 5500 100ASML
    CategoryLithography
  41. XT 1700 Fi Immersion ARFASML
    CategoryLithography
  42. ESC 400 RDAASML
  43. ESC 320 RDAASML

    The ASML ESC 320 RDA is a semiconductor manufacturing equipment item manufactured by ASML.

  44. YieldStar S 100 Overlay MeasurementASML

    The ASML YieldStar S 100 is an overlay measurement tool.

    CategoryMetrology & Inspection
  45. Twinscan XT 400 FASML
  46. 4022.634.34071 PAAC 325/14 R PPCAASML

    The ASML 4022.634.34071 PAAC 325/14 R PPCA is a new, sealed Power Mod (SERV.634.34071) cleanroom product from 2018.

  47. 4022.480.0062 Vacuum StageASML

    ASML model 4022.480.0062 is a Vacuum Stage described as an air vacuum puck in good working condition.

  48. PAS 5500 100 DASML
    CategoryLithography
  49. XT 1400 D ArFASML

    ASML XT 1400 D ArF Scanner is a lithography scanner described as supporting 8-inch and 12-inch wafers and including a wafer stage.

    CategoryLithographyWaferWafer Stage
  50. 5500ASML

    ASML PAS 5500/300 is a deep-UV stepper photolithography tool configured for 4-inch wafers.

    CategoryLithographyWafer100mmNode248 nm (KrF) DUV
  51. 60 100 200 SteppersASML
    CategoryLithography
  52. XT 1700 i Immersion LithographyASML

    The ASML XT 1700 i is an immersion lithography system from 2006.

    CategoryLithography
  53. Twinscan XT 1250 D ArFASML

    The ASML Twinscan XT 1250 D is an ArF scanner stated to use 193 nm.

    CategoryLithography
  54. 850 B KrFASML
    CategoryLithography
  55. Twinscan AT 400 S i-LineASML

    The ASML Twinscan AT 400 S is an i-line scanner stated to be a 365 nm system from 2001.

    CategoryLithography
  56. PAS5500/80ASML
    CategoryLithographyNode500nm
  57. XT 1900 GiASML

    The ASML XT 1900 Gi is an immersion scanner described with 193 mm optics, software version 5.1, CIM SECS, and a 40/45 nm process.

    CategoryLithography
  58. Twinscan 1950 i ImmersionASML
    CategoryLithography
  59. PAS 5500 60ASML
  60. 4022.470.0030 Wafer Handler Robotic RackASML
    CategoryTest & Probe