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Manufacturer

ASML

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97 entries

  1. SERV.470.54502ASML

    ASML SERV.470.54502 is a sealed cleanroom part designated as an OIU Trackball Assembly.

    CategoryWet Processing / Clean
  2. Twinscan XT 1700 i ImmersionASML

    The ASML Twinscan XT 1700 i Immersion Scanner is a 193nm immersion lithography system described as being used for volume chip production at 45nm mode.

    CategoryLithography
  3. 5500 350 CASML

    The ASML PAS 5500/350C is a DUV stepper for photolithography, typically used in a cluster with a TEL Clean Track ACT-8 coater/developer for 100 mm wafers. The system dates from 1997.

    CategoryLithography
  4. PAS 5500 275 i-LineASML

    The ASML PAS 5500 275 i-Line is an i-line stepper for 8 inch wafers.

    CategoryLithography
  5. XT 1700 Fi Immersion ARFASML
    CategoryLithography
  6. PAS 5500 300 C DUVASML

    ASML PAS 5500 / 300 C is a DUV stepper described as a deep ultraviolet lithography system.

    CategoryLithography
  7. Twinscan NXT 1980 iASML

    The ASML Twinscan NXT 1980 i is a 12-inch wafer lithography scanner that was upgraded from the 1970i model.

    CategoryLithography
  8. PAS 5500 60 i-LineASML
    CategoryLithography
  9. Twinscan XT 400 F i-LineASML

    The ASML Twinscan XT 400 F is an i-line scanner for 300 mm wafers.

    CategoryLithography
  10. PAS 5500 400 i-LineASML

    The ASML PAS 5500/400 is an i-line stepper for 8-inch wafers with a resolution of 280nm, introduced around 2002.

    CategoryLithography
  11. PAS 2500ASML

    The PAS 2500 series was the first lithography system developed entirely by ASML and became the system that built the company.

    CategoryLithography
  12. NXE 3400 B EUVASML

    The ASML TWINSCAN NXE:3400B is an extreme ultraviolet (EUV) lithography scanner designed for volume production at the 7 and 5 nm nodes.

    CategoryLithography
  13. Twinscan AT 850 DASML

    The ASML Twinscan AT 850 D is a semiconductor manufacturing tool offered with a Cymer ELS 7600 or ELS 6610 laser and a Tel Lithius track.

  14. PAS 2400ASML

    The PAS 2400 is an early photolithography system from ASML that was demonstrated in 1985 and achieved a throughput of 90 wafers per hour.

    CategoryLithography
  15. PAS 5000 55 AASML

    ASML PAS 5000 / 55 A is a stepper identified with an option set that includes Wafer Tilt Monitor.

    CategoryLithographyWaferWafer Tilt Monitor
  16. PAS 5500 22ASML

    The ASML PAS 5500/22 is a stepper used in semiconductor lithography.

    CategoryLithography
  17. XTF 400 FASML
  18. PAS 5500 300 CASML

    The ASML PAS 5500/300 C is a DUV stepper with a 248 nm exposure wavelength and 8 inch wafer support.

    CategoryLithographyWaferWafer Alignment:
  19. PAS 5500 1100 WaferASML

    The ASML PAS 5500 1100 Wafer is a lithography wafer stepper. The ASML PAS 5500 1100 Wafer is specified for 8 inch wafers.

    CategoryLithography
  20. Twinscan XT 1250 DASML

    The ASML Twinscan XT 1250 D is a dry wafer scanner featuring a dual chuck wafer stage and a Cymer XLA165 light source.

    CategoryLithographyWaferContinuous clampable wafer table for dry WSs: Absent
  21. Twinscan NXT 1980 Di ImmersionASML
    CategoryLithography
  22. 300 CASML

    The ASML 300 C is a model of equipment manufactured by ASML.

  23. 4022.471.63637 Generic Power Amp PPCAASML

    ASML 4022.471.63637 Generic Power Amp PPCA is an ASML board identified by model 4022.471.63637.

  24. Twinscan AT 1100ASML

    The ASML Twinscan AT 1100 is a 193 nm ArF laser-based lithography scanner that processes 200 mm and 300 mm wafers using dual-wafer stage technology.

    CategoryLithography
  25. AT 850 BASML

    The ASML AT 850 B is a semiconductor manufacturing system produced by ASML.

  26. YieldStar S 1375 F Overlay MeasurementASML

    The ASML YieldStar S 1375 F is an overlay measurement system for 12-inch wafers.

    CategoryMetrology & Inspection
  27. YieldStar S 100 B Overlay MeasurementASML

    The ASML YieldStar S 100 B is an overlay measurement system that processes 12-inch wafers.

    CategoryMetrology & Inspection
  28. Twinscan 1950 i ImmersionASML

    The ASML Twinscan 1950 i is an immersion scanner used in semiconductor lithography.

    CategoryLithography
  29. 5000 55 BASML

    The ASML 5000 / 55 B is a stepper that supports 6-inch wafers.

    CategoryLithography
  30. Twinscan XT 1250 D ArFASML

    The ASML Twinscan XT 1250 D is an ArF scanner stated to use 193 nm.

    CategoryLithography
  31. 4022.631.1584 Optical Gas AnalyzerASML

    ASML model 4022.631.1584 is an Optical Gas Analyzer.

    CategoryPrecision Optics
  32. Twinscan XT 1400 FASML

    The ASML Twinscan XT 1400 F Scanner is a 193nm (ArF) lithography scanner stated to handle 12-inch wafers.

    CategoryLithography
  33. Twinscan AT 400 S i-LineASML

    The ASML Twinscan AT 400 S is an i-line scanner stated to be a 365 nm system from 2001.

    CategoryLithography
  34. 4022.634.34071 PAAC 325/14 R PPCAASML

    The ASML 4022.634.34071 PAAC 325/14 R PPCA is a new, sealed Power Mod (SERV.634.34071) cleanroom product from 2018.

    CategoryWet Processing / Clean
  35. URS 5000 55 BASML

    The ASML URS 5000 / 55 B is a stepper that supports 6-inch wafers.

    CategoryLithography
  36. SERV.481.27891 ACC Controller AIASML
    CategoryWet Processing / Clean
  37. TWINSCAN NXE:3800EASML

    The TWINSCAN NXE:3800E is a dual-stage EUV lithography system designed by ASML for high-volume manufacturing of advanced Logic and Memory chips.

    CategoryLithographyNode2 nm Logic nodes and leading-edge DRAM nodes
  38. 4022.634.34071 PAAC 325/14 InterfaceASML

    The ASML 4022.634.34071 PAAC 325/14 Interface is a circuit interface module.

  39. PAS 5500 250 CASML
  40. Yield Star S 250 Overlay MeasurementASML
    CategoryMetrology & Inspection
  41. ESC 400 RDAASML
  42. PAS 5500 100ASML

    The PAS 5500/100 is a step-and-repeat i-line lithography system from ASML, introduced for 0.40 micron production.

    CategoryLithography
  43. 2500 40ASML

    The ASML 2500 / 40 is a stepper with a wafer table, reticle table, P-table, dipod, HP laser, and alignment laser.

    CategoryLithographyWaferWafer table
  44. YieldStar S 100 Overlay MeasurementASML

    The ASML YieldStar S 100 is an overlay measurement tool.

    CategoryMetrology & Inspection
  45. 5500 100ASML

    The PAS 5500/100 is a step-and-repeat i-line lithography system from ASML introduced for 0.40 micron production.

    CategoryLithography
  46. PAS 5500 300 C WaferASML

    The ASML PAS 5500 / 300 C Wafer Stepper is a wafer stepper for 6-inch wafers.

    CategoryLithography
  47. Twinscan XT 1400 F ArFASML

    The ASML Twinscan XT 1400 F ArF Scanner is a lithography scanner with a process module for 200 mm wafers and a 300 mm conversion kit.

    CategoryLithography
  48. 60 100 200 SteppersASML

    The ASML 60 100 200 Steppers is a lithography tool documented in public sources as a provisional entry with no specifications on record.

    CategoryLithography
  49. 4022.470.8527 Positioner Control PanelASML

    The ASML 4022.470.8527 is a PCB-type positioner control panel used in ASML LSE/LSM series lithography systems.

  50. PAS 5500 100 DASML

    General referenceThe ASML PAS 5500 100 D is a lithography system used in semiconductor manufacturing for patterning integrated circuit features onto wafers, belonging to the broader class of projection aligners that step and repeat or step and scan.

    CategoryLithography
  51. PAS 5500 300 DUVASML

    The ASML PAS 5500/300 DUV is a deep ultraviolet (DUV) stepper.

    CategoryLithography
  52. Twinscan XT 400 FASML

    The ASML Twinscan XT 400 F is a lithography scanner. The ASML Twinscan XT 400 F uses i-line illumination and handles 300 mm wafers.

  53. Twinscan 1700 i-PASML

    The ASML Twinscan 1700 i-P is a scanner model manufactured by ASML, available with a Cymer XLA 360 laser.

    CategoryLithography
  54. XT 1400 D ArFASML

    ASML XT 1400 D ArF Scanner is a lithography scanner described as supporting 8-inch and 12-inch wafers and including a wafer stage.

    CategoryLithographyWaferWafer Stage
  55. PAS 5500ASML

    The ASML PAS 5500/275D is a high-throughput i-line stepper with 5X reduction, 365 nm exposure, and automated wafer handling for substrates up to 200 mm diameter.

    CategoryLithographyWafer200mmNode280 nm
    Legacy
  56. PAS 5500 200 i-LineASML

    The ASML PAS 5500/200 is an i-Line stepper for semiconductor lithography.

    CategoryLithography
  57. 5500ASML

    ASML PAS 5500/300 is a deep-UV stepper photolithography tool configured for 4-inch wafers.

    CategoryLithographyWafer100mmNode248 nm (KrF) DUV
  58. PAS 5500 750ASML
    CategoryLithography
  59. XT 1700 i Immersion LithographyASML

    The ASML XT 1700 i is an immersion lithography system from 2006.

    CategoryLithography
  60. 850 B KrFASML

    The ASML 850 B KrF Scanner is a lithography scanner.

    CategoryLithography