Waferpedia

Tool family

Asyst PN: 9700 6149 01 Load Port

Asyst1 entry
LinkedIn X Email

Models in this family

  1. PN: 9700 6149 01 Load Port

    Cited variants

    DesignationGenerationVintageChangesSource
    PN: 9700 6149 01 Load Port 300FL, S2.1 HAMA / E84———Equipment inventory listing[1]
    PN: 9700 6149 01 Load Port 300FLX, S201 HAMA / E-84———Equipment inventory listing[2]
    300FL, S2.1 HAMA / E84———Equipment inventory listing[1]
    300FLX, S201 HAMA / E-84———Equipment inventory listing[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing