Waferpedia

Tool family

Asyst SMIF-300

AsystSMIF / isolation / wafer management system1 entry

Asyst SMIF-300 is a 300 mm SMIF and isolation technology product series for integrated fab solutions.

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Models in this family

  1. SMIF-300introduced 1998

    Asyst SMIF-300 is a 300 mm SMIF and isolation technology product series for integrated fab solutions.

    Cited variants

    DesignationGenerationVintageChangesSource
    SMIF-300FL———web.archive.org[1]
    SMIF-300RL———web.archive.org[1]
    SMIF-300 Wafer Management System (WMS)———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org