Waferpedia

Asyst

SMIF-300

SMIF / isolation / wafer management system300mmIntroduced Asyst SMIF-300 family
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SMIF-300 — web.archive.org
Fig. 01SMIF-300web.archive.org[1]

Wafer size

300mm

Introduced

1998

What is it?

The SMIF-300 series is described as Asyst's new product series for shifting to 300 mm wafer fabrication, using a SEMI-standard compliant building-block approach to integrate I/O, minienvironment, and buffer products into high-yielding solutions throughout the fab. The source states that the systems are compatible with both 13 and 25 front-opening unified pods and comply with all SEMI standards and all I300I industry guidelines.

What can it run?

Process applications and technology nodes documented for this tool.

  • 300 mm wafer fabrication
  • minienvironment integration
  • buffer product integration

What do the numbers mean?

Wafer handling1

Wafer size
300 mm[1]
Accurate?

Configuration & options4

Product series name
SMIF-300[1]
Accurate?
Compatibility
Compatible with both 13 and 25 front-opening unified pods[1]
Accurate?
Standards compliance
Complies with all SEMI standards and all I300I industry guidelines[1]
Accurate?
Integration approach
SEMI-standard compliant building-block approach[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
SMIF-300FL———web.archive.org[1]
SMIF-300RL———web.archive.org[1]
SMIF-300 Wafer Management System (WMS)———web.archive.org[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SMIF-300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SMIF-300 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the SMIF-300 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SMIF-300 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SMIF-300 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the SMIF-300 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.