Asyst
SMIF-300
The Asyst SMIF-300 is a 300mm SMIF / isolation / wafer management system. The Asyst SMIF-300 series is compatible with both 13 and 25 front-opening unified pods. The Asyst SMIF-300 series complies with all SEMI standards and all I300I industry guidelines.[1][2]
Wafer size
300mm
Produced
1998–
What it is
The Asyst SMIF-300 is a SMIF, isolation, and wafer management system for 300 mm wafer fabrication. The Asyst SMIF-300 was introduced in 1998. The SMIF-300 series used a SEMI-standard compliant building-block approach for integrating I/O, minienvironment, and buffer products throughout the fab. The SMIF-300 series was compatible with both 13 and 25 front-opening unified pods. The SMIF-300 series complied with all SEMI standards and all I300I industry guidelines. The SMIF-300 family included the SMIF-300FL, SMIF-300RL, and SMIF-300 Wafer Management System.[1][2]
How it works
The Asyst SMIF-300 Wafer Management System was a fully automated wafer transfer system. The Asyst SMIF-300 WMS featured a wafer handling system for rapid wafer transfer.[3]
Where it fits in the process flow
Applications
The Asyst SMIF-300 series was used for 300 mm wafer fabrication. The series supported minienvironment integration and buffer product integration throughout the fab.[1][2]
- 300 mm wafer fabrication
- minienvironment integration
- buffer product integration
What do the numbers mean?
Wafer handling2
Configuration & options4
- Standards compliance
- Complies with all SEMI standards and all I300I industry guidelines[1]2 sources
Vintage & configurations
- 1998Production start[2]
Introduced in 1998.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What kind of equipment is the Asyst SMIF-300?
The Asyst SMIF-300 is a SMIF, isolation, and wafer management system.[2]
Not publicly documented
The following facts about the SMIF-300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the SMIF-300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SMIF-300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SMIF-300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SMIF-300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the SMIF-300 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Asyst SMIF 300 WMS Wafer Management System. Smif-300 Wms Is A Fully Automated Wafer Transfer System That Features A Reliable Wafer Handling System Providing Rapid Wa . Product Category: Semiconductor, Sub Category: Lab Equipment Refurbished — yorkscientific.comyorkscientific.com
Last updated Oct 16, 2026.