Waferpedia

Tool family

Blue M 8850 D-1 Box

Blue MThermal / Diffusion1 entry

Blue M 8850 D-1 Box Furnace.

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Models in this family

  1. 8850 D-1 Box

    The Blue M 8850 D-1 Box is a box furnace in the Thermal / Diffusion category. The Blue M 8850 D-1 Box has a maximum temperature of 1093 degree C and is specified for 480V, 3 Ph, 60 Hz operation.