Brooks ATM

Models in this family

1. ATM 204 207 Atmospheric Wafer Handling Robot

   The Brooks / PRI ATM 204 / 207 is an atmospheric wafer handling robot described as a single-arm unit.

2. ATM 305 307 Atmospheric Wafer Handling Robot

   The Brooks / PRI ATM 305 / 307 is an atmospheric wafer handling robot described as a single-arm system.

3. ATM 407 B 2 S CE S 293 Robot
4. ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot