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Tool family

Bruce BDF 41 Diffusion

Bruce BDF 41 Diffusion Furnace.

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Models in this family

  1. The Bruce BDF 41 is a diffusion furnace configured for 6-inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    BDF 41 (4 Stack)——Described as a 4-stack version.brucetechnologiesinc.com[1]
    DBTB-2 (DIRE-10)—1993A 1993 vintage configuration with tube-specific process assignments and a documented control and gas configuration.brucetechnologiesinc.com[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]brucetechnologiesinc.combrucetechnologiesinc.com
  2. [2]brucetechnologiesinc.combrucetechnologiesinc.com