Waferpedia

Tool family

CyberOptics SQ3000-CMM

The SQ3000-CMM is a CyberOptics coordinate measurement system described as fast and highly accurate for metrology applications.

Models in this family

  1. The SQ3000-CMM is a CyberOptics coordinate measurement system described as fast and highly accurate for metrology applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    SQ3000-XLarger maximum feature size / measurement area stated as 710 x 610 mm (27.9 x 24 in.) versus SQ3000 at 510 x 510 mm (20 x 20 in.).web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org