CyberOptics

SQ3000-CMM

Precision Optics CyberOptics SQ3000-CMM family

Research Quality: 40% complete

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Plate 01SQ3000 for High-Precision Measurement & Inspection - SQ3000 CMM by CyberOptics
CyberOpticsCorpWatch on YouTube
Plate 02SQ3000™ Multi-Function Overview (Europe Presentation) | CyberOptics SMT Inspection
CyberOpticsCorpWatch on YouTube
Plate 03Socket Metrology with SQ3000™ CMM | CyberOptics Corporation
CyberOpticsCorpWatch on YouTube
Plate 04SQ3000™ CyberCMM™ Software Suite | CyberOptics Corporation
CyberOpticsCorpWatch on YouTube

Performance

2 μm^[2]

Optics

0.5µm^[2]

What is it?

The SQ3000-CMM is a coordinate measurement system using CyberCMM software and MRS-enabled technology to provide metrology-grade measurements on critical points. The sources describe it as suitable for applications in PCB, semiconductor, consumer electronics, microelectronics, and socket metrology, and state that it supports multi-process use across AOI, SPI, AOM, and CMM.

What can it run?

Process applications and technology nodes documented for this tool.

PCBs
semiconductors
consumer electronics
metrology applications
semiconductor applications
micro-electronics applications
socket metrology
SMT applications

What do the numbers mean?

Optics & imaging7

Inspection speed: Standard MRS Sensor: 40 cm²/sec (2D+3D); High-Speed MRS Sensor: 50 cm²/sec (2D+3D); High-Resolution MRS Sensor: 20 cm²/sec (2D+3D); Ultra-High Resolution MRS Sensor: 15 cm²/sec (2D+3D)^[2]
Field of view (FOV): Standard MRS Sensor: 36 x 30 mm; High-Speed MRS Sensor: 36 x 36 mm; High-Resolution MRS Sensor: 26 x 26 mm; Ultra-High Resolution MRS Sensor: 21 x 21 mm^[2]
X Y resolution: Standard MRS Sensor and High-Speed MRS Sensor: 10µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 7µm^[2]
Z resolution: 0.5µm^[2]
Accuracy XY: Standard MRS Sensor and High-Speed MRS Sensor: 6µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 5µm^[2]
Minimum feature size: Standard MRS Sensor and High-Speed MRS Sensor: 100µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 70µm^[2]
Maximum feature height: Standard MRS Sensor and High-Speed MRS Sensor: 24mm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 8mm^[2]

Performance1

Accuracy Z: 2 μm^[2]

Control & software1

Software: CyberCMM^[1]

Dimensions & facilities2

Coordinate measurement capability: Line / Distance / X,Y / Mid Line, Inter Point / Regression Shifted, Datum X,Y / LSF X,Y Offset, X,Y Offset / Value / Location / List of X,Y Values, Height / Local Height / Regression Radius, Coplanarity / Distance to plane / 2nd Order fitting, Difference / Absolute / 2sqrt / VC, Max / Min / Ave / Sigma / Plus / Minus / Multiple^[2]
Minimum feature height: 50 μm^[2]

Configuration & options2

Maximum feature size: SQ3000: 510 x 510 mm (20 x 20 in.); SQ3000-X: 710 x 610 mm (27.9 x 24 in.)^[2]
Technology: MRS technology / MRS-enabled technology^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
SQ3000-X	—	—	Larger maximum feature size / measurement area stated as 710 x 610 mm (27.9 x 24 in.) versus SQ3000 at 510 x 510 mm (20 x 20 in.).	web.archive.org^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the SQ3000-CMM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SQ3000-CMM are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the SQ3000-CMM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SQ3000-CMM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SQ3000-CMM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SQ3000-CMM are on record.
Answerable by: an OEM parts catalog or a service engineer