Waferpedia

Tool family

Edwards EPM75

EdwardsCoating component1 entry

The Edwards EPM75 is a planar magnetron sputtering source for vacuum coating systems.

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Models in this family

  1. EPM75

    The Edwards EPM75 is a planar magnetron sputtering source for vacuum coating systems.

    Cited variants

    DesignationGenerationVintageChangesSource
    EPM100———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org