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Edwards

EPM75

Coating componentEdwards EPM75 family
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EPM75 — web.archive.org
Fig. 01EPM75web.archive.org[1]

What is it?

The EPM75 is described as one of the BOC Edwards planar magnetron sputtering sources, alongside the EPM100. It is intended to be fitted and positioned in vacuum systems with suitable 25 mm or 1 inch diameter holes, and it supports RF or DC operation, magnetron or diode sputtering, and offset leadthrough-based radial positioning.

What can it run?

Process applications and technology nodes documented for this tool.

  • Vacuum coating systems
  • Thin film deposition

What do the numbers mean?

Power & electrical1

Operation modes
RF or DC operation[1]
Accurate?

Vacuum & pumping1

Fitment
Easy to fit and position in any vacuum system that has suitable 25 mm or 1 inch diameter holes[1]
Accurate?

Configuration & options5

Product type
Planar magnetron sputtering source[1]
Accurate?
Leadthrough design
Offset leadthrough design allows easy adjustment of the radial source position[1]
Accurate?
Leadthrough size
Integral NW25 leadthrough[1]
Accurate?
Sputtering modes
Magnetron or diode sputtering[1]
Accurate?
Provenance
Used for many years in BOC Edwards sputtering systems[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
EPM100———web.archive.org[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • FitmentEasy to fit and position in any vacuum system that has suitable 25 mm or 1 inch diameter holes[1]
  • Operation modesRF or DC operation[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the EPM75 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EPM75 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the EPM75 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EPM75 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EPM75 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the EPM75 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.