Waferpedia

Tool family

ESI 5330

ESI1 entry

ESI 5330 Laser.

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Models in this family

  1. The ESI 5330 is a laser tool with a 30-70 kHz repetition-rate range, 6.1 W maximum work-surface power, and pulse width of 80 ns at 30 kHz and 140 ns at 70 kHz.