Waferpedia

Tool family

Filmetrics F42

The Filmetrics F42 is a thin-film thickness measurement system for mapping thickness at over one-million points with spot sizes as small as 3 microns.

Models in this family

  1. The Filmetrics F42 is a thin-film thickness measurement system for mapping thickness at over one-million points with spot sizes as small as 3 microns.