Waferpedia

Manufacturer

Filmetrics

30 entries

  1. F50-UVFilmetrics

    The Filmetrics F50-UV is a thin-film metrology tool that measures film thickness via spectroscopic reflectometry and can generate thickness uniformity maps.

    CategoryMetrology & InspectionWafer8"
  2. R50Filmetrics

    The Filmetrics R50 – 200 – 4PP is a metrology tool configured by default for metallic layers and sample thicknesses of 525 µm ± 25 µm.

    CategoryMetrology & InspectionWafer200mm
  3. F-40-UVFilmetrics

    The Filmetrics F-40-UV is a microscope-mounted optical reflectometer for rapid thin film thickness and optical constants measurements.

    CategoryThin-Film/Material Analysis
  4. 4PPFilmetrics

    The Filmetrics 4PP is a sheet resistance measurement tool in the Characterization category.

    CategoryCharacterization
  5. F50Filmetrics

    The Filmetrics F50 is an optical film thickness and wafer-mapping system for thickness and optical property measurements on substrates.

    CategoryMetrology & InspectionWafer150mm
  6. F20-UVFilmetrics

    The FilMetrics F20-UV is an optical measurement instrument listed in EPFL's Center of MicroNanoTechnology equipment pages.

    CategoryPrecision Optics
  7. F80-CFilmetrics

    The Filmetrics F80-C is a film thickness mapping tool for patterned wafers that uses Thickness Imaging technology to generate thickness images quickly.

    CategoryFilm thickness mapping tool for patterned wafers
  8. F10-HCFilmetrics

    The Filmetrics F10-HC is a hardcoat thickness measurement instrument based on the F20 platform that measures single- and multi-layer hardcoats using spectral reflectance analysis.

    CategoryHardcoat Thickness Measurement Instrument
  9. F10-RTFilmetrics
    Wafer6"
  10. R50-4PPFilmetrics

    The Filmetrics R50-4PP is a four-probe measurement system for metal, conductive oxide, silicon, and polysilicon layers.

    CategoryElectrical measurementWafer525 um +/- 25 um sample thickness default configuration
  11. RS50Filmetrics

    The Filmetrics RS50 is a 4-point probe mapping system for sheet resistance measurement.

    CategoryTest & ProbeWafer200mm
  12. F40Filmetrics

    The Filmetrics F40 is a film-thickness measurement instrument used for patterned films and reflectometry applications.

    CategoryReflectometry
  13. F54-XY-200Filmetrics

    The Filmetrics F54-XY-200 is an automated thickness mapping system with measurement range from 4 nm up to 35 µm.

    CategoryAutomated Thickness Mapping Systems
  14. F10-ARFilmetrics

    The Filmetrics F10-AR is an anti-reflection coating measurement system designed for ophthalmic anti-reflection coatings and hardcoats.

    CategoryAnti-reflection coating measurement system
  15. F10-PAFilmetrics

    The Filmetrics F10-PA is a parylene thickness measurement system designed specifically for parylene thickness measurements.

    CategoryParylene thickness measurement system
  16. F37Filmetrics

    The Filmetrics F37 is an in-line thickness measurement system for measuring film thickness in-line and in real time at up to seven locations.

    CategoryIn-line thickness measurement system
  17. F42Filmetrics

    The Filmetrics F42 is a thin-film thickness measurement system for mapping thickness at over one-million points with spot sizes as small as 3 microns.

    CategoryThin-film thickness measurement system
  18. F60Filmetrics

    The Filmetrics F60 is a film thickness and index mapping instrument for production environments.

    CategoryFilm thickness mapping instrument
  19. F60-tFilmetrics

    The Filmetrics F60-t is a film thickness and index mapping instrument for production environments with automatic notch finding, on-board baselining, and an enclosed measurement stage with motion interlock.

    Categoryfilm thickness mapping instrument
  20. F70Filmetrics

    The Filmetrics F70 measures the thickness of glass and plastic materials up to 13 mm thick.

    Categorythickness measurement instrument
  21. F80Filmetrics

    Filmetrics F80 is a thin-film thickness mapping system for product wafers that measures patterned wafers and generates thickness images.

    Categorythin-film thickness measurement system
    Legacy
  22. F10-VCFilmetrics

    The Filmetrics F10-VC is a simultaneous reflectance and transmittance measurement instrument with optional thickness and index measurement modules.

    Categorysimultaneous reflectance and transmittance measurement instrument
  23. F80-AFilmetrics

    The Filmetrics F80-A is a film thickness mapping tool for patterned wafers that combines full F80 functionality with Ricmar's WTT 300 Wafer Transfer Tool in a single EFEM platform.

    CategoryFilm thickness mapping tool
  24. F20Filmetrics

    The Filmetrics F20 is an optical reflectometer used to measure film thicknesses of dielectrics, semiconductors, and thin metals.

    CategoryPrecision Optics
  25. F10-RT-UVXFilmetrics
    CategoryMetrology & Inspection
  26. F20-EXRFilmetrics

    The Filmetrics F20-EXR uses spectral reflectance for measuring ITO thickness and other display-layer films.

    Categorythin-film thickness measurement instrument
  27. F20sFilmetrics

    Filmetrics F20s is a film-measurement instrument used in university teaching labs and for measuring thin-film thickness and optical properties in several application areas.

    Categoryfilm-measurement instrument
  28. F80-TFilmetrics

    The Filmetrics F80-T is a film thickness mapping system for patterned wafers that uses Thickness Imaging technology.

    CategoryFilm thickness mapping system for patterned wafers
  29. Profilm3DFilmetrics

    Profilm3D is a Filmetrics optical profiler used for profilometry-based film thickness measurements and 3D surface profiling.

    CategoryPrecision Optics
  30. F30Filmetrics

    The Filmetrics F30 is a spectral reflectance system for real-time thin-film deposition monitoring.

    Categorythin-film thickness measurement instrument