Tool family
GCA AutoStep 200 AutoStep 200
GCA1 entry
Models in this family
The GCA AutoStep 200 is a semiconductor manufacturing tool for 8-inch wafers, featuring a ceramic high stability wafer chuck and 500nm capability with single patterning.
Tool family
The GCA AutoStep 200 is a semiconductor manufacturing tool for 8-inch wafers, featuring a ceramic high stability wafer chuck and 500nm capability with single patterning.
