Manufacturer
GCA
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12 entries
- 8500 WaferGCA
The GCA 8500 is a commercial wafer stepper from GCA that performs 5x-reduction i-line photolithography, accepts 150 mm wafers, and resolves sub-micron features.
CategoryLithography - 200GCA
The GCA 200 is an i-line wafer stepper for lithography requiring high resolution and critical alignment.
CategoryLithographyWaferup to 6-inch diameter wafers; substrate size approximately 10 x 10 mm up to 100 mm, with 150 mm possibleNodei-line - 8500GCA
The GCA 8500 is a commercial wafer stepper used for photolithography. The GCA 8500 performs 5x reduction i-line photolithography and accepts 150 mm wafers.
- 3696GCA
The GCA 3696 is a step-and-repeat camera (photorepeater) built around a DEC PDP-11/04 minicomputer.
Wafer150mmNodelegacy semiconductor lithography equipment - 6300 DSWGCA
The GCA 6300 DSW is a g-line wafer stepper used for lithography, with source descriptions also identifying related i-line GCA 6300 stepper documentation.
CategoryLithographyWafer150mmNode5X g-line wafer stepper - AS200GCA
The GCA AutoStep 200 DSW (also known as AS200) is a 5X reduction i-line wafer stepper designed for up to 200mm wafers.
CategoryLithographyWafer200mm - 6100 C WaferGCA
The GCA 6100 C Wafer Stepper is a lithography tool for 100 mm wafers with a 150 mm X/Y stage travel and an AWH1 automatic wafer handler.
CategoryLithographyWafer100mm - Precision Scientific 19 LaboratoryGCA
The GCA Precision Scientific 19 Laboratory is a laboratory oven with a recirculating chiller.
CategoryThermal / Diffusion - 1006GCA
GCA 1006 is a wafer coating process condition referenced in a photoresist technical data sheet.
- Tropel UltraSort II FlatnessGCA
The GCA Tropel UltraSort II Flatness Tester is a flatness tester that accepts 6-inch wafers.
CategoryTest & Probe - AutoStep 200 AutoStep 200GCA
The GCA AutoStep 200 is a semiconductor manufacturing tool for 8-inch wafers, featuring a ceramic high stability wafer chuck and 500nm capability with single patterning.
CategoryLithographyWaferCeramic high stability wafer chuck - 3600GCA
General referenceGCA 3600 is a pattern generator, a class of lithography-related equipment used to create writing data or directly write geometric features needed for mask making and related microfabrication tasks. Machines of this class serve as front-end pattern creation tools that define the artwork later transferred through photolithographic processing.
CategoryPattern Generator
