9 entries
- AS200GCACategoryLithographyWafer200mm
- 8500 WaferGCA
The GCA 8500 is a commercial wafer stepper from GCA that performs 5x-reduction i-line photolithography, accepts 150 mm wafers, and resolves sub-micron features.
CategoryLithography - AutoStep 200 AutoStep 200GCA
The GCA AutoStep 200 is a semiconductor manufacturing tool for 8-inch wafers, featuring a ceramic high stability wafer chuck and 500nm capability with single patterning.
WaferCeramic high stability wafer chuck - 6100 C WaferGCA
The GCA 6100 C Wafer Stepper is a lithography tool for 100 mm wafers with a 150 mm X/Y stage travel and an AWH1 automatic wafer handler.
CategoryLithographyWafer100mm - 3696GCA
The GCA 3696 is a step-and-repeat camera (photorepeater) built around a DEC PDP-11/04 minicomputer.
Wafer150mmNodelegacy semiconductor lithography equipment - 6300 DSWGCA
The GCA 6300 DSW is a g-line wafer stepper used for lithography, with source descriptions also identifying related i-line GCA 6300 stepper documentation.
CategoryLithographyWafer150mmNode5X g-line wafer stepper - Precision Scientific 19 LaboratoryGCACategoryThermal / Diffusion
- Tropel UltraSort II FlatnessGCACategoryTest & Probe
- 3600GCACategoryPattern Generator
