Tool family
JEOL JLC-500 is identified in JEOL product-guide pages as a product with an evaluation document titled "Evaluation of Technical Performances of JEOL JLC-500 AminoTac."
The JEOL JLC-500 is a metrology and inspection tool. In semiconductor and related microfabrication work, machines of this class are used to examine patterned surfaces and measure critical features for process control and defect review.