Tool family
The KLA Filmetrics F40 is a microscope-based thin-film measurement instrument that uses spectral reflectance technology to measure thickness and optical constants.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| F40 | — | — | Wavelength range 400–850 nm, thickness range 20 nm–40 µm (5X objective) | kla.com[1] |
| F40-UV | — | — | Wavelength range 190–1100 nm, thickness range 4 nm–40 µm (5X objective) | kla.com[1] |
| F40-EXR | — | — | Wavelength range 400–1700 nm, thickness range 20 nm–150 µm (2X objective) | kla.com[1] |
| F40-NIR | — | — | Wavelength range 950–1700 nm, thickness range 100 nm–120 µm (5X objective) | kla.com[1] |
| F40-UVX | — | — | Wavelength range 190–1700 nm, thickness range 4 nm–120 µm (5X objective) | kla.com[1] |
| F40-XT | — | — | Wavelength range 1440–1690 nm, thickness range 0.4 µm–250 µm (2X objective) | kla.com[1] |