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KLA

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580 entries

  1. eS 32 E-BeamKLA

    The KLA eS 32 is an E-Beam Inspection System.

    CategoryMetrology & Inspection
  2. 200KLA

    The KLA 200 series is a pattern inspection station used for reticle and photomask inspection.

    CategoryMetrology & Inspection
  3. FT 750KLA

    The KLA FT-750 is a visible light spectrophotometer-based thin film measurement system for semiconductor process control.

    CategoryLithography
  4. Alpha Step D 300 StylusKLA

    The KLA AlphaStep D-300 is a stylus-based surface profiler that measures step heights from 50 nm to 300 µm.

    CategoryMetrology & Inspection
  5. F 60KLA

    KLA F 60 is a film thickness measurement tool used in semiconductor metrology and inspection.

    CategoryMetrology & Inspection
  6. 1.112 PSL WaferKLA

    The KLA 1.112 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 inspection systems.

    CategoryMetrology & Inspection
  7. SLF 17KLA

    The KLA SLF 17 is an inspection system.

    CategoryMetrology & Inspection
  8. Candela CS 2 SurfaceKLA

    KLA Candela CS 2 Surface is a metrology and inspection tool described as a surface inspection system and surface analyzer.

    CategoryMetrology & Inspection
  9. Archer 300 OverlayKLA

    The KLA Archer 300 is an overlay metrology system for optical overlay measurements on 300mm wafers.

    CategoryMetrology & Inspection
  10. 8100 XP CD-SEMKLA

    The KLA 8100 XP is a critical dimension scanning electron microscope (CD-SEM) designed for automated CD measurements on silicon wafers and reticles, featuring production-proven electron optics for bottom imaging of high aspect ratio structures.

    CategoryMetrology & Inspection
  11. Surfscan SP 1KLA

    The KLA Surfscan SP 1 is a wafer inspection tool from KLA-Tencor used for defect detection and surface quality inspection on polished wafers, epi wafers, and engineered substrates.

  12. Alpha Step D 500 Wafer Profiler MeterKLA

    The KLA Alpha Step D 500 Wafer Profiler Meter is a stylus profiler for 2D step height measurement, roughness, bow, and stress metrology.

    CategoryMetrology & Inspection
  13. Surfscan 6XY0 TrainingKLA

    KLA Surfscan 6 XY 0 Training is an equipment entry identified by model Surfscan 6 XY 0.

  14. CS 20 R Surface AnalyzerKLA

    The KLA CS 20 R Surface Analyzer is a surface analysis tool used in semiconductor manufacturing.

  15. Flexus F 2320 I Stress MeasurementKLA

    The KLA Flexus F 2320 I is a stress measurement system for semiconductor wafers that supports 6-inch and 8-inch wafers and uses dual wavelength measurement.

    CategoryTest & ProbeWafer6"
  16. Candela CS 20 R Dual SurfaceKLA
    CategoryMetrology & Inspection
  17. Inspex EagleKLA

    The KLA Inspex Eagle Tester is a wafer handling and inspection system with 6-inch chuck and prealigner, 4-inch to 8-inch wafer capability, cassette-to-cassette handling, two ports, and a Zeiss microscope.

    CategoryTest & ProbeWafer8"
  18. P 16 SurfaceKLA

    The KLA P 16 Surface is a surface profilometer described as a fully refurbished unit with Windows XP, extended range up to 1 mm, and a 3D option.

    CategoryMetrology & Inspection
  19. Surfscan SP 1 TBI KeyboardKLA

    The KLA Surfscan SP 1 TBI Keyboard is a keyboard-only replacement part for the KLA Surfscan SP 1 TBI system.

    CategoryMetrology & Inspection
  20. Surfscan 7700 Particle DefectKLA

    The KLA Surfscan 7700 is a particle defect inspection system.

    CategoryMetrology & Inspection
  21. Candela CS 10 R Wafer InspectorKLA

    The KLA Candela CS 10 R Wafer Inspector is a single-phase wafer inspector with a 50/60 Hz, 5 A power specification and a booting upgrade requirement.

    CategoryMetrology & Inspection
  22. SL 305KLA
  23. RS 35 A Sheet Resistance MeasurementKLA
    CategoryMetrology & Inspection
  24. SCD 100 Film Thickness MeasurementKLA

    The KLA SCD 100 is a film thickness measurement tool.

  25. 5100 Overlay MeasurementKLA

    The KLA 5100 Overlay Measurement System is an overlay measurement system with an 8-inch wafer size.

    CategoryMetrology & Inspection
  26. RS 75 Resistivity MapperKLA

    The KLA RS 75 Resistivity Mapper is a resistivity mapping tool for 8-inch wafers.

    CategoryMetrology & Inspection
  27. PCA 54.0294 Turret Servo DriverKLA

    The KLA PCA 54.0294 Turret Servo Driver is a turret servo driver manufactured by KLA under the model designation PCA 54.0294.

    CategoryLab & Support Equipment
  28. RS 100 PartsKLA
    CategoryMetrology & Inspection
  29. F 5 X PartsKLA
    CategoryMetrology & Inspection
  30. Surfscan SP 1 DLS Particle DefectKLA

    The KLA Surfscan SP 1 DLS Particle Defect System is a wafer inspection tool cited in sources with 8-inch, 12-inch, and 300mm configurations.

    CategoryMetrology & Inspection
  31. SpectraCD 200 WaferKLA

    The KLA SpectraCD 200 is a wafer inspection system.

    CategoryMetrology & Inspection
  32. P 20 H ProfilerKLA

    The KLA P 20 H Profiler is a metrology and inspection tool categorized as a parts unit and part of the KLA P family.

    CategoryMetrology & Inspection
  33. Candela 8620 SurfaceKLA

    The KLA Candela 8620 Surface is a surface inspection system in the Candela 8620 model line.

    CategoryMetrology & Inspection
  34. OP 5220 Film Thickness MeasurementKLA

    The KLA / Therma-wave OP 5220 is a film thickness measurement tool.

    CategoryMetrology & Inspection
  35. Candela CS 920 Surface AnalyzerKLA

    The KLA Candela CS 920 Surface Analyzer is a metrology and inspection tool that includes a PSC Calibration Wafer.

    CategoryMetrology & InspectionWaferIncludes PSC Calibration Wafer
  36. P 16 + ProfilerKLA

    KLA P 16 + Profiler is a metrology and inspection tool with listed wafer sizes from 2 inch to 12 inch.

    CategoryMetrology & Inspection
  37. TP 420 Implant Dosing MeasurementKLA
    CategoryIon Implantation
  38. Counterweight-50x-100xNikonDIKLA

    The Counterweight-50x-100xNikonDI is a KLA Instruments spare part listed in the KLA Instruments online store.

  39. Candela 8520 SurfaceKLA

    The KLA Candela 8520 Surface is a surface inspection system for wafer inspection on 6-inch and 8-inch wafers.

    CategoryMetrology & Inspection
  40. 2213-75 TSLKTB ArgonKLA

    KLA 2213-75 TSLKTB Argon Laser is a refurbished argon laser compatible with KLA AIT II, AIT XP, and AIT XP+ systems.

    CategoryMetrology & Inspection
  41. CondWafer-4PPKLA

    The KLA CondWafer-4PP is a product listed in the KLA Instruments online store.

  42. Surfscan SP 5 Particle DefectKLA

    The KLA Surfscan SP 5 Particle Defect System is a bare wafer inspection station configured for 12-inch wafers.

    CategoryMetrology & InspectionWaferBare Wafer Inspection Station
  43. Surfscan SP 3 Particle DefectKLA

    The KLA Surfscan SP 3 Particle Defect System is a bare wafer inspection station for 12-inch wafers with DUV illumination.

    CategoryMetrology & InspectionWaferBare wafer inspection station
  44. OmniMap RS 75 Resistivity MapperKLA

    The KLA OmniMap RS 75 Resistivity Mapper is a resistivity mapping tool.

    CategoryMetrology & Inspection
  45. eV 300KLA

    KLA eV 300 is an advanced, fully automated scanning electron microscope defect review tool for manufacturing environment use.

    CategoryMetrology & Inspection
  46. OmniMap RS55KLA

    The KLA-Tencor Omnimap RS55/TC is a semiconductor equipment manufactured by KLA-Tencor and supports 8-inch wafers.

  47. 6XY0 PM Service AgreementKLA

    The KLA 6XY0 PM Service Agreement is a preventive maintenance service contract.

  48. Aleris HX 8500 Ellipsometry MeasurementKLA

    The KLA Aleris HX 8500 is an ellipsometry measurement tool introduced in 2008.

    CategoryMetrology & Inspection
  49. 6220KLA

    The KLA 6220 is a particle inspection and bare wafer surface defect inspection system.

  50. 1007KLA

    The KLA 1007 is a wafer prober manufactured by KLA.

    CategoryTest & Probe
  51. MicroSense UMSC 200 BT MeasurementKLA

    The KLA / MicroSense UMSC 200 BT Measurement System is a non-contact measurement system for flatness and thickness measurement.

    CategoryMetrology & Inspection
  52. 7600 Patterned Wafer Particle DefectKLA

    The KLA 7600 Patterned Wafer Particle Defect is a metrology and inspection system configured for a 25 Wafer Slot Cassette.

    CategoryMetrology & InspectionWafer25 Wafer Slot Cassette
  53. TP 500 Implant Dosing MeasurementKLA

    The KLA TP 500 Implant Dosing Measurement is an ion implantation equipment model from KLA / Therma-Wave.

    CategoryIon Implantation
  54. HRP 220 SurfaceKLA

    The KLA HRP 220 Surface is a surface profilometer.

    CategoryMetrology & Inspection
  55. OP 2690 Film Thickness MeasurementKLA

    The KLA OP 2690 Film Thickness Measurement System is a metrology tool for 8-inch wafers.

  56. INS 2000 Macro DefectKLA

    The KLA INS 2000 Macro Defect is a KLA / Leica metrology and inspection tool.

    CategoryMetrology & Inspection
  57. SpectraShape 9000 Critical Dimension (CD) MeasurementKLA

    The KLA SpectraShape 9000 is a Critical Dimension (CD) measurement tool that supports 12-inch wafers.

    CategoryMetrology & Inspection
  58. FLX 2320 Stress MeasurementKLA

    The KLA FLX 2320 Stress Measurement is a stress measurement system that accommodates 8-inch wafers.

  59. Puma 9120KLA

    The KLA Puma 9120 is a dark-field defect detection tool for semiconductor wafer inspection. The KLA Puma 9120 is configured for 200 mm and 300 mm wafers and has two cameras.

  60. ATL 150 i Overlay MeasurementKLA

    The KLA ATL 150 i is an overlay measurement system designed for 12-inch wafers.

    CategoryMetrology & Inspection