KLA

The KLA .498 PSL Wafer is a NIST traceable reference wafer.

The KLA 2132 is a patterned wafer defect inspection tool that uses brightfield, small-pixel, high data rate digital image processing to detect yield-relevant defects.

The KLA 1007 is a wafer prober manufactured by KLA.

The KLA 200 series is a pattern inspection station used for reticle and photomask inspection.

The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.

The KLA AlphaStep D-300 is a stylus-based surface profiler that measures step heights from 50 nm to 300 µm.

The KLA 1.112 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 inspection systems.

The KLA Archer 300 is an overlay metrology system for optical overlay measurements on 300mm wafers.

The KLA PN 277096 Head Electronics PC Assembly is a revision G printed circuit board assembly that is capable of working on KLA P 22 systems.

The KLA FLX 2320 A is a thin film stress measurement system manufactured by KLA.

The KLA Surfscan SP 1 TBI Keyboard is a keyboard-only replacement part for the KLA Surfscan SP 1 TBI system.

KLA P-7 is a research grade stylus profiler for surface metrology and measurement.

The KLA Surfscan 7700 is a particle defect inspection system.

KLA Surfscan SP 1 TBI is an unpatterned wafer inspection system with triple-beam illumination and brightfield capability.

The KLA Tencor P-17 is an eighth-generation benchtop stylus profiler for measuring step height, roughness, bow, and stress on substrates up to 200 mm.

The KLA Tencor P-2 is a profilometer with a 200 mm sample table with vacuum and a 3D scan option.

The KLA Inspex Eagle Tester is a wafer handling and inspection system with 6-inch chuck and prealigner, 4-inch to 8-inch wafer capability, cassette-to-cassette handling, two ports, and a Zeiss microscope.

The KLA / Therma-wave OP 1600 is a film thickness measurement system for 8-inch wafers.

The KLA 2133 Brightfield is a wafer inspection tool for 6-inch wafers.

The KLA Archer 10 XT Overlay System is a 200mm overlay metrology system with refurbishment-upgraded components and software version 5.6.

The KLA Tencor D600 is a stylus surface profiler for thin and thick film step height measurement.

The KLA Surfscan SP 3 Particle Defect System is a bare wafer inspection station for 12-inch wafers with DUV illumination.

The KLA Alpha Step IQ Contact is a contact profilometer.

The KLA P 16 + is a profilometer with wafer sizes of 6 and 8 inches.

The KLA/ADE UltraGage 9500 is a wafer geometry measurement system.