Lam Research 716 069688 809 ESC Assy

Models in this family

1. 716 069688 809 ESC Assy

   The Lam Research 716 069688 809 ESC Assy is an electrostatic chuck assembly used within an etch tool. In this equipment class, the assembly serves as the wafer-holding interface at the process station during plasma etching.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   716 069688 809 ESC Assy Inner, SI W/ Stud, Socket	—	—	Inner silicon variant with stud and socket	Equipment inventory listing[1]
   716 069688 809 ESC Assy Inner, SI	—	—	Inner silicon variant without stud and socket	Equipment inventory listing[2]
   Inner, SI W/ Stud, Socket	—	—	—	Equipment inventory listing[1]
   Inner, SI	—	—	—	Equipment inventory listing[2]

Sources