Waferpedia

Manufacturer

Lam Research

296 entries

  1. 839 800327 509 B ESCLam Research

    The Lam 839 800327 509 B is an electrostatic chuck.

  2. Alliance A 6 Exelan HPT DielectricLam Research
    CategoryEtch
  3. Gasonics L 3300Lam Research

    The Lam / Novellus / Gasonics L 3300 is an asher for 6-inch wafers.

  4. Gasonics Triple Speed NFLam Research

    The Lam / Novellus / Gasonics Triple Speed NF is a chemical vapor deposition (CVD) system with three HDP chambers, a Brooks robot, SLM type, three ports, and loadlock helium reduction.

    CategoryDeposition
  5. IPEC AvantGaard 776 TungstenLam Research
    CategoryCMP
  6. 590Lam Research

    The Lam Research 590 is a plasma etcher.

    CategoryEtch
  7. SEZ SP 201 SpinLam Research
    CategoryEtch
  8. Gasonics L 3500Lam Research
  9. 9600 DryLam Research

    The Lam Research TCP 9600 is a dry etch system for metal etching, designed for 200 mm wafers.

    CategoryEtch
  10. 716 064782 602 ESC AssyLam Research
  11. P/N: 853-032776-605 DSQ Paddle Lifter AssemblyLam Research

    The Lam P/N: 853-032776-605 DSQ Paddle Lifter Assembly is a refurbished semiconductor equipment component.

  12. 2300 e 4 Exelan GXLam Research

    The Lam 2300 e 4 Exelan GX is an etcher used in semiconductor manufacturing.

    CategoryEtch
  13. SEZ 201 BacksideLam Research

    The Lam/SEZ 201 Backside Etcher is a backside etching tool for 8-inch wafers.

    CategoryEtch
  14. Gasonics PEP 3510 PlusLam Research

    The Lam/Novellus/Gasonics PEP 3510 Plus is a semiconductor processing tool that handles 8-inch wafers and includes a 2 kW microwave generator.

  15. SEZ 203 SpinLam Research

    The Lam / SEZ 203 is a spin processor used for wet etching and backside cleaning of 200mm wafers.

    CategoryEtch
  16. TCP 9400 SELam Research

    The Lam Research TCP 9400 SE is an inductively coupled plasma etch system used for polysilicon/polycide etch and shallow trench isolation.

    CategoryEtch
  17. 2300 Versys Kiyo PolysiliconLam Research

    The Lam Research 2300 Versys Kiyo Polysilicon Etch is a 300mm wafer plasma etch system designed for polysilicon etching.

    CategoryEtch
  18. Gasonics VHP HorizontalLam Research
    CategoryThermal / Diffusion
  19. 839 800332 106 ESC HousingLam Research

    The Lam 839 800332 106 ESC Housing is a part for semiconductor wafer processing equipment.

  20. Alliance A 6 TCP 9400 DFM PolysiliconLam Research

    The Lam Alliance A 6 TCP 9400 DFM is an 8-inch polysilicon etch system from Lam Research.

    CategoryEtch
  21. 2300 V 2 Versys Kiyo 45 PolysiliconLam Research

    The Lam 2300 V 2 Versys Kiyo 45 is a 12-inch polysilicon etch system.

    CategoryEtch
  22. SEZ RST 201 SpinLam Research
    CategoryEtch
  23. 2300 e 4 Kiyo FXLam Research
    CategoryEtch
  24. SEZ SP 304 Single Wafer ProcessingLam Research

    The Lam/SEZ SP 304 is a single wafer processing system supporting 12-inch wafers.

  25. Alliance 9400Lam Research

    The Lam Research Alliance 9400 is an 8-inch semiconductor etching device.

  26. AutoEtch 494Lam Research
    CategoryEtch
  27. SEZ SP 102 4 BLam Research
  28. Strata 3Lam Research
  29. 2300 e 4 Kiyo MCX MetalLam Research
    CategoryEtch
  30. Flex FX OxideLam Research
    CategoryEtch
  31. 839-101612-883 ESC ChuckLam Research

    The Lam 839-101612-883 is an electrostatic chuck (ESC) component.

  32. 2300 Flex F Series MetalLam Research
    CategoryEtch
  33. VEXTLam Research
    CategoryDeposition
  34. VEXPLam Research
    CategoryDeposition
  35. Rainbow 4506 ILam Research
    CategoryEtch
  36. Concept Two Triple SpeedLam Research

    Lam / Novellus Concept Two Triple Speed is a PECVD system for 8-inch wafers.

    CategoryDepositionWaferEntegris FA 200-85 MT 7902 Wafer Cassette
  37. SEZ SP 4300 Single Wafer ProcessingLam Research
  38. Sosul Extrima 3100 BevelLam Research

    The Lam / Sosul Extrima 3100 is a bevel etching system for 12-inch wafers.

    CategoryEtch
  39. Gasonics Gamma 2130 Asher / StripperLam Research
  40. TCP 9400 SE PolysiliconLam Research

    The Lam TCP 9400 SE Polysilicon Etch is an 8-inch wafer polysilicon etching system.

    CategoryEtch
  41. Rainbow 4720 MetalLam Research
    CategoryEtch
  42. Rainbow 4520 i DielectricLam Research

    The Lam Research Rainbow 4520 i is a dielectric etch tool available in configurations for 6-inch and 8-inch wafer sizes.

    CategoryEtch
  43. Rainbow 4520 DielectricLam Research
    CategoryEtch
  44. Alliance A 6 TCP 9600 PTX MetalLam Research
    CategoryEtch
  45. Alliance A 6 TCP 9400 PTX PolysiliconLam Research
    CategoryEtch
  46. Rainbow 4420 Multi-ProcessLam Research

    The Lam Research Rainbow 4420 Multi-Process is an etch tool.

    CategoryEtch
  47. VectorLam Research
    CategoryDeposition
  48. 2300 V 2 Exelan Flex 45 DielectricLam Research

    The Lam Research 2300 V 2 Exelan Flex 45 is a dielectric etch system designed for 12-inch wafers.

    CategoryEtch
  49. 2300 V 2 Kiyo EX Metal MetalLam Research

    The Lam 2300 V 2 Kiyo EX Metal Metal Etch is a 12-inch wafer etch tool manufactured by Lam Research.

    CategoryEtch
  50. 2300 V 2 Kiyo 45 MetalLam Research
    CategoryEtch
  51. 2300 Exelan DielectricLam Research
    CategoryEtch
  52. 2300 e 5 Kiyo EX PolysiliconLam Research
    CategoryEtch
  53. 2300 e 5 Exelan Flex FX DielectricLam Research
    CategoryEtch
  54. 2300 Multi-ProcessLam Research
    CategoryEtch
  55. 2300 e 5 Kiyo EXP PolysiliconLam Research

    The Lam 2300 e 5 Kiyo EXP Polysilicon Etch is a 12-inch wafer etch system from Lam Research.

    CategoryEtch
  56. IPEC 372 MLam Research
    CategoryCMP
  57. Gasonics PEP 3510 Plus Asher / StripperLam Research
  58. Gasonics L 3510 Asher / StripperLam Research
  59. Exelan HPTLam Research
    CategoryEtch
  60. Concept Two SequelLam Research

    The Lam / Novellus Concept Two Sequel is a PECVD (plasma-enhanced chemical vapor deposition) system for 8-inch wafers.

    CategoryDeposition