Laurell 400-series

Models in this family

1. 

   400-seriesintroduced 1995produced 1995–Discontinued

   Laurell's WS-400-6NPP is a 400-series spin coater with a 400-series process controller, a 1.75" vacuum chuck, and support for wafers up to 150 mm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   WS-400-6NPP	—	1995	Described as a manual tabletop system; sources also note a 650-series replacement controller on newer models and that the 650 is not available on 6 series systems.	web.archive.org[1]

Sources