Laurell
400-series
Wafer size
150mm
Produced
1995–
Power
95 to 240 VAC, 47/63 Hz, ~300 Watts[1]
Vacuum
1.75" (45 mm) diameter vacuum chuck[2]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Coating
- Etching
- Developing
- Rinsing-Drying
- Cleaning
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Dispense options on this model are limited to manual applicators.
- The model is not upgradable.
What do the numbers mean?
Power & electrical1
Vacuum & pumping2
Wafer handling4
- Standard adapter coverage
- One fragment adapter standard covering 10 mm through 150 mm SEMI wafers[1]
Control & software1
- Process controller
- 400-series process controller capable of storing and automatically running process recipes consisting of run time and acceleration rate, with manual operation also supported[1]
Configuration & options1
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| WS-400-6NPP | — | 1995 | Described as a manual tabletop system; sources also note a 650-series replacement controller on newer models and that the 650 is not available on 6 series systems. | web.archive.org[1] |
What replaced it?
Related models
- successorLaurell WS-650— The WS-650 controller is stated to have replaced the WS-400.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 400-series are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the 400-series are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 400-series is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 400-series are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 400-series are on record.
Answerable by: university cleanroom staff or an OEM application specialist
The operating principle of the 400-series is not documented in this record.
Answerable by: an equipment physicist or OEM application engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]400-Series Controller - Laurell Technologies — images.laurell.comimages.laurell.com
Last updated Jul 29, 2026.
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