Laurell EDC-650-15

Models in this family

1. 

   EDC-650-15650-series

   The Laurell EDC-650-15 is a station-mounted 650-series spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   EDC-650-15 B	650-series	—	Variant designation shown in the sources; no differences versus the base line are explicitly stated.	web.archive.org[1]

Sources