Tool family

Laurell EDC-650-23

The Laurell EDC-650-23 is a 650-series spin processor that accommodates up to Ø 150 mm wafers and 5" × 5" substrates.

Models in this family

EDC-650-23
The Laurell EDC-650-23 is a 650-series spin processor that accommodates up to Ø 150 mm wafers and 5" × 5" substrates.
Cited variants
Designation Generation Vintage Changes Source
EDC-650-23 B — — Listed as the station-mounted EDC-650-23 B version of the EDC system. web.archive.org^[1]

Designation	Generation	Vintage	Changes	Source
EDC-650-23 B	—	—	Listed as the station-mounted EDC-650-23 B version of the EDC system.	web.archive.org^[1]

Sources (1)Every fact above is drawn from these public sources